Hello Everyone,
As for poly-Si etching our never-ending problem came across again:
http://sam.zeloof.xyz/second-ic/
https://eur-lex.europa.eu/legal-content/EN/TXT/?uri=CELEX:32019R1148
He is probably not an European guy... And Europe aims to be on the map in terms of scientific progress... Never mind, we need no amateurs. Just spill a ton of public money onto our for-profit firms, they will solve everything in the right way. < / rant >
The problem is nitric acid, that is visible outright. The n-dopant is also likely no-go (I did not find explicitly, but knowing how the legislators think, they may crap their pants on the word "phosphorus compound"). Any idea on solving this?
Regards,
Ferenc
On 14/08/2021 14:13, David Lanzendörfer wrote:
Hi Yes. That's what I'm planning to do as well. The idea just was to design a bit more compact stepper, which can also be scaled up and sold for professional industrial environments, considering that the furnace costs 3200 USD and I've got to get the cash back in :-)
Cheers, lev
On Saturday, August 14, 2021 9:44:11 AM WEST Luke Kenneth Casson Leighton wrote: