6 Mar
2018
6 Mar
'18
1:57 p.m.
Hi
How do you want to handle that later with smaller nodes?
For that it would be interesting to have access to the full IEEE document here: http://ieeexplore.ieee.org/document/5984621 They apparently made it work.
I think they all have the problem of aligning gates, isn't it?
This document thematizes that very well. http://electroiq.com/blog/2010/03/integrating-high-k
Gate-first-gate-last problem, is exactly what we have here right now. If we use poly for the gate first we will have a problem with grainyness but if we do gate-last with Aluminum we will have a alignement issue.
The attached picture delivers us an idea for gate-last self-aligning
Cheers David
