Hello Everyone,
I checked the masks. The overall result is Not OK. The detailed problems are the following:
- via1, 2, contact oversized (what shall be 5um is 9um)
- nimplant, pimplant undersized (shall 20 is 12)
- silicideblock, implantblock undersized (shall 15 is 7)
- sti oversized (shall 35 is 39)
- sonos oversized (shall 12.5 is 8.5)
Other layers (glass, fox, pwell, nwell, pbase, nbase, poly, metal1, 2, 3) are OK.
The first two points remind me some troubles we had initially but got rectified later. Maybe this is a leftover from them? Also, I would add some identification (one or two letters) to the masks as it is pretty confusing to handle them separately (especially implantblock and silicideblock are almost the same). We have some free space in the middle for that.
Regards,
Ferenc