Hi Staf
What do you think about making two versions of the document?
In one we explore the method of doping by using infusion and hard mask,
in the other one we use implantation and resist?

like... process_steps_implant.pdf and process_steps_diffusion.pdf

Cheers
	David

On Thursday, 21 June 2018 1:39:23 AM HKT Staf Verhaegen wrote:

I see you are using a hard mask for well and diffusion implants. As far as I
can remember the resist itself is used as stopping layer for the implants
and you don't need the extra steps for the hard masks. And I do think they
are even thicker than the hard mask you are using.