David Lanzendörfer schreef op wo 01-05-2019 om 11:02 [+0800]:
Hi
We're now finalizing the first wafer with nitride spacers and have prepared
two wafers with STI, which will be thermally compensated, so that the
threshold voltage will be somewhere around the 0.7V/-0.7V threshold.
I'm not a quitter, and getting this node to work is more of an existential
need for me, so if everything goes well, we can provide the diode and also a
general NMOS/PMOS model on Friday in a week.
Thing is that I have not seen any electrical measurements of any active device yet. What I have seen up to now is just some top down pictures; so my conclusion with the information I have is that currently the patterning is still being developed. When I was involved in process development the patterning development was the development step needed before the real process development could be started. Only from the moment I/V curves could be measured the real development of the devices could be started. I have never seen that implantation settings that come out of formulas/simulations were the right values from the start. Typically the first measured data were needed to re-calibrate the TCAD simulator :) and with the next iteration maybe some modulation was seen of the gate voltage on the output current... Of course we are now redoing mature nodes where things should be better understood but from the other side I seem to have understood the implantation doses, temperatures etc. were determined by generic formulas from literature and not with TCAD simulators calibrated with the characteristics of the materials and equipment inside the used clean room.
I admire you drive for getting this process working but I still think you have a lot to learn yet and a lot of development work ahead. So I still think the statement on the funding page is more wishful thinking than reality. I still remember the original plan of having ring oscillator working @ 35C3. I certainly don't want to stop you but would like to explain where (part of) the skepticism in the micro-electronics world is coming from.
greets,
Staf.