David Lanzendörfer schreef op zo 08-04-2018 om 22:28 [+0800]:

Hi
Here is the ICO white paper we've discussed in the Mumble conference.
Glad for feedback:
https://docs.google.com/document/d/1XdLKafFeYxJJ69Lj8CvbAB36MNBcKUnrF3OQehWtyBc/edit?usp=sharing

Only had time to quickly browse through the document. I am surprised by the use of e-beam for prototyping.

Did you look at the possible throughput you can get in that way ?

With normal litho processing throughput is given in wafers per hour; for e-beam it is in hours per wafer. And this for each litho step.

greets,

Staf.