On Tue, Jan 14, 2020 at 7:00 PM Hagen SANKOWSKI <hsank@posteo.de> wrote:

Hello.

On 1/14/20 11:08 AM, David Lanzendörfer wrote:

>> I guess that is both a very ambitious but at the same time very tempting
>> project. Looking forward to seeing self-made litho steppers pop up in
>> hackspaces ;D
> Exactly. Yes.

:-)

> We can use a DMD[1] which already can go down to 500nm, as I've seen
> recently[2], assuming, we get the lens system right.

A issue I see here is the pattern structure of DMDs. Between all the
small mirrors are always even smaller gaps.

If we like to draw a bar, eg. poly or whatever
(ASCII-Art)

------------------------- -----
^
|
v
------------------------- -----

the mirrors are with a gap instead

+-------+ +-------+ -----
| mirror| |mirror | ^
| | gap | | |
| | | | v
+-------+ +-------+ -----

|<----->|
???

This means that it becomes difficult to "stitch" two mirrors gap-less.
For human eyes it does not matter, the eyes does not see the pixel /
pattern structure. But I guess, the photo resist will see 'em - so we
have to tricked them out somehow.

Can we use here diffraction?
Or we already need double-pattering here?

Regards,
Hagen.

--
support LibreSilicon to get back into the Clean Room
https://www.gofundme.com/f/libresilicon-cleanroom-rent

_______________________________________________
Libresilicon-developers mailing list
Libresilicon-developers@list.libresilicon.com
https://secure-web.cisco.com/1X48t-eiDZPXuS3di6IC1xHDUuEQ5PNtCMljSC7HHWWK2fL8eXVUZId5FIJWetqtwlyRCH5TEcdYnDp14vrL98QEsWiGOFel2DA1ukp9mAyCrJLQmOvAsxeKV-I1Q8EICCVOhZ5RD3US1X4ydX1EU7Wr19BVDpfJLzjtYqYZ1gjgnWmHymClgWu4aBNU69M5q03lMmBUkIyWAN6B3tim8ZdhwUQtl-zw_aUBJnrN404AkvSpHHx3UimhVNuCtwEQmQ1Sb78Qqpil9mwQqtde853NA5J93_BVscLDMkrgRgbVl7QMQ-bHwP7WnCV76gUxRoxtFrjOWhC9544WXosy8W9-VodD2fJPBSwwchPmz6SIa8Ph4ivjZq7fF4c_nmX3VXQd9Cyz0WHZl7lR3_QrxcK-RcqUciHG5JAA5lauAiWBeHUMh0ITEFZ12cSuvcq_jwN7f65GUg8ZMh5atoqeMrA/https%3A%2F%2Flist.libresilicon.com%2Fmailman%2Flistinfo%2Flibresilicon-developers