11 May
2019
11 May
'19
6:48 a.m.
Hi And I just realized that it might not be obvious to some, what this email has to do with ESD protection. So I'll elaborate a bit.
Tuesday I'll attend the formal training for the Cirie200 (nickel dry etch machine), as well as finalize implant stop, nimplant, pimplant, annealing, nitride spacers + silicide block, and then I put it into the furnace for LTO deposition.
implant stop and silicide block are the two steps additionally required, for building Zener polysilicon diodes.
When I've got the diode curves from those test structures, we can built a rudimentary ESD protection into the bonding pads, which will allow us to wire bonding the diced dies without frying them.
Cheers David