Hello Everyone, Here is my evaluation of necessary mask inversions: - nwell: darkfield - pwell: darkfield - pbase: darkfield - nbase: darkfield - sti: brightfield - fox: darkfield - sonos: brightfield - gate: brightfield - implant block nitride: brightfield - nimplant: darkfield - pimplant: darkfield - silicide block: brightfield - contact: darkfield - metal{1|2|3}: brightfield - via{1|2}: darkfield - glass: darkfield Regards, Ferenc