Dear folks Since I'm still on the fundraising campaign for getting my new lab access, we've got now time to prepare for the new battle by fixing up our designs, according to the findings we made during the last year.
It's an opportunity for us to put more test structures into the PearlRiver, respectively fixing up mistakes we did with older test structures.
Also, I'd like to put some test pad cells in there in order to see whether they already work. Assuming we fix the issue with the STI CMP and the active area CMP, they should start doing something at least.
Also, we've still got ONE dark field square left on one of the masks. -> Ideas for an additional feature needing a dark field mask? :D
Besides that: PLEASE donate something to our rent, so that the fundraising is done quicker: --> https://www.gofundme.com/f/libresilicon-cleanroom-rent
-lev
I just had an idea on my own BTW What about making deep oxide holes with this mask before sputtering metal1? Since between the metal layers we will anyway deposit nitride now as CMP stop we will have dielectrics for free essentially. So when making a big hole, we basically have deep caps between metal1 and metal2.
Cheers -lev
On Saturday, 3 August 2019 1:18:03 PM HKT David Lanzendörfer wrote:
Also, we've still got ONE dark field square left on one of the masks. -> Ideas for an additional feature needing a dark field mask?
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