[Libre-silicon-devel] Mumble conference: ICO white paper

Hagen SANKOWSKI hsank at posteo.de
Sun Apr 8 19:36:17 CEST 2018


Hello Staf.

This Paper is somehow historical - I requested it from David during our
weekly mumble session today.

Regards,
Hagen.

On 04/08/2018 04:47 PM, Staf Verhaegen wrote:
> David Lanzendörfer schreef op zo 08-04-2018 om 22:28 [+0800]:
>> Hi
>> Here is the ICO white paper we've discussed in the Mumble conference.
>> Glad for feedback:
>> https://docs.google.com/document/d/1XdLKafFeYxJJ69Lj8CvbAB36MNBcKUnrF3OQehWtyBc/edit?usp=sharing
>> <https://docs.google.com/document/d/1XdLKafFeYxJJ69Lj8CvbAB36MNBcKUnrF3OQehWtyBc/edit?usp=sharing
>> >
> 
> Only had time to quickly browse through the document. I am surprised by
> the use of e-beam for prototyping.
> Did you look at the possible throughput you can get in that way ?
> With normal litho processing throughput is given in wafers per hour; for
> e-beam it is in hours per wafer. And this for each litho step.
> 
> greets,
> Staf.
> 
> 
> 
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