[Libre-silicon-devel] Status update: Silicide

David Lanzendörfer david.lanzendoerfer at o2s.ch
Mon May 6 11:15:40 CEST 2019


Hi all

So today I went with 2 probes down to the die frame with polysilicon and 
silicide on top and measured.
The resistance was so low, that the measurement device just rounded it to zero 
ohms.
I've made a Tweet about it:
https://twitter.com/LibreSilicon/status/1125324508997382145

We're still waiting for the NFF RIE (dry etcher) to be functional again.
If they can repair it until tomorrow morning, I can make the holes and sputter 
the interconnect wires, and then we should have the first switching curves 
around Wednesday (as promised)

Cheers
-lev
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