[Libre-silicon-devel] ESD protection
david.lanzendoerfer at lanceville.cn
Sat May 11 07:48:40 CEST 2019
And I just realized that it might not be obvious to some, what this email has
to do with ESD protection. So I'll elaborate a bit.
> Tuesday I'll attend the formal training for the Cirie200 (nickel dry etch
> machine), as well as finalize implant stop, nimplant, pimplant, annealing,
> nitride spacers + silicide block, and then I put it into the furnace for LTO
implant stop and silicide block are the two steps additionally required, for
building Zener polysilicon diodes.
When I've got the diode curves from those test structures, we can built a
rudimentary ESD protection into the bonding pads, which will allow us to wire
bonding the diced dies without frying them.
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