[Libre-silicon-devel] ESD protection
cm.hardware.software.elsewhere at gmail.com
Sat May 11 17:32:09 CEST 2019
On Sat, May 11, 2019 at 7:48 AM David Lanzendörfer
<david.lanzendoerfer at lanceville.cn> wrote:
> And I just realized that it might not be obvious to some, what this email has
> to do with ESD protection. So I'll elaborate a bit.
Thanks. This elaboration helps.
> > Tuesday I'll attend the formal training for the Cirie200 (nickel dry etch
> > machine), as well as finalize implant stop, nimplant, pimplant, annealing,
> > nitride spacers + silicide block, and then I put it into the furnace for LTO
> > deposition.
> implant stop and silicide block are the two steps additionally required, for
> building Zener polysilicon diodes.
> When I've got the diode curves from those test structures, we can built a
> rudimentary ESD protection into the bonding pads, which will allow us to wire
> bonding the diced dies without frying them.
> Libre-silicon-devel mailing list
> Libre-silicon-devel at list.libresilicon.com
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