[Libre-silicon-devel] ESD protection

David Lanzendörfer david.lanzendoerfer at o2s.ch
Thu May 16 14:20:20 CEST 2019

Hi all
So today I finished the nitride spacers, but because the dry etcher had 
problems again, it took me until 18.30h, until I finally was done and left the 
Tomorrow I try to pull another stunt like this and get the silicide formation 
and LTO done.
Maybe I even can manage to etch the wires, but it's many steps left, and I'm 
not sure I get it all done tomorrow.

Just a little update.


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