[Libre-silicon-devel] ESD protection
david.lanzendoerfer at lanceville.cn
Fri May 17 07:31:14 CEST 2019
So the wafer is now in the furnace, depositing LTO.
Unfortunately it will only be done around 5pm where I can't enter the lab
On Monday, when I get it back, I will etch the oxide holes and sputter the
nickel first thing in the morning.
Those damn holidays really did cost me a day.
If the lab would have been open on Monday, I would be done now...
> Hi all
> So today I finished the nitride spacers, but because the dry etcher had
> problems again, it took me until 18.30h, until I finally was done and left
> the lab.
> Tomorrow I try to pull another stunt like this and get the silicide
> formation and LTO done.
> Maybe I even can manage to etch the wires, but it's many steps left, and I'm
> not sure I get it all done tomorrow.
> Just a little update.
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