[Libre-silicon-devel] Maskless lithography
leviathan at libresilicon.com
Sun Feb 23 17:42:46 CET 2020
I'm apparently not the first one with the idea to use a DMD chip and an UV
light source for exposure:
There are actually parts available:
For those chips, the UV wave length would be around 360nm
The price on Mouser is 8888 USD, so around 9 thousand USD
The chip is exactly made for mask less lithography systems as the one I wanna
build, it's even mentioned in the data sheet:
By optimizing the aperture of the lens system, this means that one could
perfectly fine produce feature sizes down to 150 nm or so, maybe even smaller.
I wonder, whether we should make a gofundme campaign for buying the
required second hand stepper and this chip... Hmm.
Also. Since this chip is super expensive, we will need to *really* make sure,
that there's no mistake in the PCB, because we only have one attempt.
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