[Libre-silicon-devel] Maskless lithography

Staf Verhaegen staf at fibraservi.eu
Sun Feb 23 18:06:28 CET 2020

David Lanzendörfer schreef op ma 24-02-2020 om 00:42 [+0800]:
> HiI'm apparently not the first one with the idea to use a DMD chip and an UVlight source for exposure:https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-the-illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785

Also Sam Zeloof has made his own chip with a DLP projector:


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://list.libresilicon.com/pipermail/libresilicon-developers/attachments/20200223/31c03d02/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: signature.asc
Type: application/pgp-signature
Size: 490 bytes
Desc: This is a digitally signed message part
URL: <http://list.libresilicon.com/pipermail/libresilicon-developers/attachments/20200223/31c03d02/attachment.sig>

More information about the Libresilicon-developers mailing list