[Libre-silicon-devel] Maskless lithography

Staf Verhaegen staf at fibraservi.eu
Sun Feb 23 18:06:28 CET 2020


David Lanzendörfer schreef op ma 24-02-2020 om 00:42 [+0800]:
> HiI'm apparently not the first one with the idea to use a DMD chip and an UVlight source for exposure:https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-the-illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785

Also Sam Zeloof has made his own chip with a DLP projector:
http://sam.zeloof.xyz/maskless-photolithography/

greets,
Staf.

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