[Libre-silicon-devel] Maskless lithography

Pavel Nikulin pavel at noa-labs.com
Sun Feb 23 18:38:11 CET 2020


There are a number of microled startups that are still labs scale.
Growing an AlInGaN instead of GaN + MQW might be a challenge, or it
might be not. The cost of custom run will from them will be
interesting to know.


On Sun, Feb 23, 2020 at 8:25 PM David Lanzendörfer
<leviathan at libresilicon.com> wrote:
>
> Hi
> I like the idea.
> Some researchers apparently have already tried it out and it's feasible:
> https://aip.scitation.org/doi/abs/10.1063/1.1942636?ver=pdfcov&journalCode=apl
>
> If a UV microLED matrix is less expensive than a DMD device, I certainly will
> go for it!
>
> Thanks so much for the tip!
>
> Do you have any suggestions on components suitable for that task?
>
> Cheers
> -lev
>
> On Monday, 24 February 2020 1:18:52 AM HKT Pavel Nikulin wrote:
> > Few ideas from me,
> >
> > If you are going to stick with 360nm light for now, regular fused silica
> > should not absorbing it that much. DUV litho needs 200w+ light sources
> > because their optics is way more massive and more complex.
> >
> > Have you thought of making something like a microled matrix? Getting 50w
> > from it onto the wafer with liquid cooling, and simple optics should be
> > real.
> >
> > On Sun, Feb 23, 2020 at 8:06 PM Staf Verhaegen <staf at fibraservi.eu> wrote:
> > > David Lanzendörfer schreef op ma 24-02-2020 om 00:42 [+0800]:
> > >
> > > Hi
> > >
> > > I'm apparently not the first one with the idea to use a DMD chip and an UV
> > >
> > > light source for exposure:
> > >
> > >
> > > <https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-the
> > > -illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785>>
> > >  <https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-th
> > >  e-illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785>https://w
> > >  ww.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-the-illumina
> > >  tion-is-in-the-UV-spectrum-then-it-must_fig4_50395785>
> > > Also Sam Zeloof has made his own chip with a DLP projector:
> > > http://sam.zeloof.xyz/maskless-photolithography/
> > >
> > > greets,
> > > Staf.
> > >
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