[Libre-silicon-devel] Maskless lithography

David Lanzendörfer leviathan at libresilicon.com
Sun Feb 23 18:39:33 CET 2020


Hi
What would be nice, would be EUV LEDs, so that we can have even better
feature sizes.
If we already go customized, why not directly EUV? :-)

-lev

On Monday, 24 February 2020 1:38:11 AM HKT Pavel Nikulin wrote:
> There are a number of microled startups that are still labs scale.
> Growing an AlInGaN instead of GaN + MQW might be a challenge, or it
> might be not. The cost of custom run will from them will be
> interesting to know.
> 
> 
> On Sun, Feb 23, 2020 at 8:25 PM David Lanzendörfer
> 
> <leviathan at libresilicon.com> wrote:
> > Hi
> > I like the idea.
> > Some researchers apparently have already tried it out and it's feasible:
> > https://aip.scitation.org/doi/abs/10.1063/1.1942636?ver=pdfcov&journalCode
> > =apl
> > 
> > If a UV microLED matrix is less expensive than a DMD device, I certainly
> > will go for it!
> > 
> > Thanks so much for the tip!
> > 
> > Do you have any suggestions on components suitable for that task?
> > 
> > Cheers
> > -lev
> > 
> > On Monday, 24 February 2020 1:18:52 AM HKT Pavel Nikulin wrote:
> > > Few ideas from me,
> > > 
> > > If you are going to stick with 360nm light for now, regular fused silica
> > > should not absorbing it that much. DUV litho needs 200w+ light sources
> > > because their optics is way more massive and more complex.
> > > 
> > > Have you thought of making something like a microled matrix? Getting 50w
> > > from it onto the wafer with liquid cooling, and simple optics should be
> > > real.
> > > 
> > > On Sun, Feb 23, 2020 at 8:06 PM Staf Verhaegen <staf at fibraservi.eu> 
wrote:
> > > > David Lanzendörfer schreef op ma 24-02-2020 om 00:42 [+0800]:
> > > > 
> > > > Hi
> > > > 
> > > > I'm apparently not the first one with the idea to use a DMD chip and
> > > > an UV
> > > > 
> > > > light source for exposure:
> > > > 
> > > > 
> > > > <https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-If
> > > > -the
> > > > -illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785>>
> > > > 
> > > >  <https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-I
> > > >  f-th
> > > >  e-illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785>https
> > > >  ://w
> > > >  ww.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-the-illu
> > > >  mina
> > > >  tion-is-in-the-UV-spectrum-then-it-must_fig4_50395785>
> > > > 
> > > > Also Sam Zeloof has made his own chip with a DLP projector:
> > > > http://sam.zeloof.xyz/maskless-photolithography/
> > > > 
> > > > greets,
> > > > Staf.
> > > > 
> > > > _______________________________________________
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> > > > Libresilicon-developers at list.libresilicon.com
> > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers
> 
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