[Libre-silicon-devel] Maskless lithography

Staf Verhaegen staf at fibraservi.eu
Sun Feb 23 18:42:25 CET 2020


David Lanzendörfer schreef op ma 24-02-2020 om 01:39 [+0800]:
> Hi
> What would be nice, would be EUV LEDs, so that we can have even better
> feature sizes.
> If we already go customized, why not directly EUV? :-)

Be aware that EUV lithography needs to be done in near vacuum.
Staf.


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