[Libre-silicon-devel] Reminder - Next Mumble session on Sunday, 12/01/2020, 21.00 HKT

Wickel, Noah noah.wickel at rwth-aachen.de
Sun Jan 12 21:08:14 CET 2020

Hello everyone,
i am Noah, M.Sc. in EE / Nanoelectronics from RWTH Aachen University. would be very interested participating in building a stepper scanner. What is your idea for tackling the problem? It would be helpful to understand what kind of expertise is needed in the team (as I do not know the current members of this group and couldnt join the mumble chat yesterday) to see if i could be of much help.
Small disclaimer, I would be able to participate come the second week of February. Right now my schedule is way too packed already.

Best, Noah

Von: Libresilicon-developers <libresilicon-developers-bounces at list.libresilicon.com> im Auftrag von David Lanzendörfer <david.lanzendoerfer at lanceville.cn>
Gesendet: Sonntag, 12. Januar 2020 18:32:45
An: libresilicon-developers at list.libresilicon.com
Betreff: Re: [Libre-silicon-devel] Reminder - Next Mumble session on Sunday, 12/01/2020, 21.00 HKT

I've now sent an email to a mass-tape-out capable factory in Portugal,
and asked whether they'd be interested into participating into LibreSilicon.
I'm now waiting for an answer.

About the stepper aligner with mask less lithography feature:
You don't need a clean room for refurbishing an old stepper aligner and
replacing the mask exposure part with a projector.

I'm right now in Hong Kong and will most likely move over to Portugal,
as soon as I finally get a feedback from the European Union on the status
of my offer to continue our research there.

I don't have the time to work full time on reverse engineering a stepper
aligner besides developing a manufacturing process, but I can certainly
give any volunteer for this task a helping hand with my long years of
experience in doing so.


On Monday, 13 January 2020 12:44:27 AM HKT Hagen SANKOWSKI wrote:
> Hello List.
> Today, while talking about different possibilities to get back into a
> clean room and to continue with our work there, we had once again an
> other technical topic in our weekly Mumble session regarding the feature
> size on the steppers [0],[1].
> All other machines are quite feasible in every clean room, but the
> resolution of the stepper determinate the size feature size of our
> technology node. Or, with smaller stepper resolutions we can manufacture
> smaller structures with Photolithography [2],[3] on silicon. Short, this
> machines limiting our possibilities, and, of course, they need masks [4]
> which are quite expensive.
> Already a couple of weeks ago came up the idea of using quite common
> display techniques instead of classical masks, which would allow to
> manufacture / photolithography mask-less but faster than usual Laser
> plotters are. Today Ference proposed to use the also quite common DPL
> technique [6],[7] which is used in Off-the-Shelf Projectors.
> So we are now thinking about designing / building a Stepper from
> scratch, or to replace the mask-holding parts / optics by something like
> Laser + Diffusor + DLP.
> Of course, this machine building stuff should be also open source,
> public and community-driven as well as our LibreSilicon process. In the
> beginning there is no need for keeping this machine in a clean room
> under controlled conditions. Just later, when it comes to production a
> machines has to get clean.
> So are there physicist out there which like to deal with this topic of
> constructing / hacking hacking such equipment?
> Please, if somebody of you on the list, or someone in your social
> surroundings, is interesting in this topic, let us know it. We are happy
> to seeing this kind of hacktivism also rising :-)
> Best Regards,
> Hagen.
> [0] https://en.wikipedia.org/wiki/Stepper
> [1] https://de.wikipedia.org/wiki/Stepper_(Halbleitertechnik)
> [2] https://en.wikipedia.org/wiki/Photolithography
> [3] https://de.wikipedia.org/wiki/Fotolithografie_(Halbleitertechnik)
> [4] https://en.wikipedia.org/wiki/Photomask
> [5] https://de.wikipedia.org/wiki/Fotomaske
> [6[ https://en.wikipedia.org/wiki/Digital_Light_Processing
> [7] https://de.wikipedia.org/wiki/Digital_Light_Processing
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