[Libre-silicon-devel] Stepper / Litho system ideas

Hagen SANKOWSKI hsank at posteo.de
Tue Jan 14 11:59:48 CET 2020


On 1/14/20 11:08 AM, David Lanzendörfer wrote:

>> I guess that is both a very ambitious but at the same time very tempting
>> project. Looking forward to seeing self-made litho steppers pop up in
>> hackspaces ;D
> Exactly. Yes.


> We can use a DMD[1] which already can go down to 500nm, as I've seen
> recently[2], assuming, we get the lens system right.

A issue I see here is the pattern structure of DMDs. Between all the
small mirrors are always even smaller gaps.

If we like to draw a bar, eg. poly or whatever

-------------------------    -----
-------------------------    -----

the mirrors are with a gap instead

+-------+	+-------+    -----
| mirror|	|mirror	|      ^
|	|  gap	|	|      |
|	|	|	|      v
+-------+	+-------+    -----


This means that it becomes difficult to "stitch" two mirrors gap-less.
For human eyes it does not matter, the eyes does not see the pixel /
pattern structure. But I guess, the photo resist will see 'em - so we
have to tricked them out somehow.

Can we use here diffraction?
Or we already need double-pattering here?


support LibreSilicon to get back into the Clean Room

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