[Libre-silicon-devel] Stepper / Litho system ideas

[Paul Gerhardt]

DLP/DMD is promising. I'd also say check out the short throw laser
projectors - in particular the new Xiaomi 4k model has native 0.5um pitch,
5000 lumens and only costs ¥10999rmb/€1433 for CNY specials - it uses ALPD
3.0 though as I understand it Appotronics came out with an even newer 4.0
spec in 2018: http://www.appotronicsusa.com/alpd_technology.html
-pmg

On Tue, Jan 14, 2020 at 7:00 PM Hagen SANKOWSKI <hsank at posteo.de> wrote:

> Hello.
>
> On 1/14/20 11:08 AM, David Lanzendörfer wrote:
>
> >> I guess that is both a very ambitious but at the same time very tempting
> >> project. Looking forward to seeing self-made litho steppers pop up in
> >> hackspaces ;D
> > Exactly. Yes.
>
> :-)
>
> > We can use a DMD[1] which already can go down to 500nm, as I've seen
> > recently[2], assuming, we get the lens system right.
>
> A issue I see here is the pattern structure of DMDs. Between all the
> small mirrors are always even smaller gaps.
>
> If we like to draw a bar, eg. poly or whatever
> (ASCII-Art)
>
> -------------------------    -----
>                                ^
>                                |
>                                v
> -------------------------    -----
>
> the mirrors are with a gap instead
>
> +-------+       +-------+    -----
> | mirror|       |mirror |      ^
> |       |  gap  |       |      |
> |       |       |       |      v
> +-------+       +-------+    -----
>
>         |<----->|
>            ???
>
> This means that it becomes difficult to "stitch" two mirrors gap-less.
> For human eyes it does not matter, the eyes does not see the pixel /
> pattern structure. But I guess, the photo resist will see 'em - so we
> have to tricked them out somehow.
>
> Can we use here diffraction?
> Or we already need double-pattering here?
>
> Regards,
> Hagen.
>
> --
> support LibreSilicon to get back into the Clean Room
> https://www.gofundme.com/f/libresilicon-cleanroom-rent
>
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