From martingeisse at googlemail.com Fri Apr 2 14:39:28 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Fri, 2 Apr 2021 14:39:28 +0200 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-03-21 @ 18:00 UTC In-Reply-To: <0804d473-bcf9-f369-5061-e00537dbb7ac@gmail.com> References: <0804d473-bcf9-f369-5061-e00537dbb7ac@gmail.com> Message-ID: Hi, > - LS50U/MLL: It is proposed to make a maskless exposure unit based on > JBD's uLED panel targeted at 50-100um MFS, and make it available bundled > into a "DIY Microchip Fabrication Kit" containing everything needed for > a basic process. Details discussed so far: ... > Just another two considerations: Our target audience with this kit is > the unit-radius citizen without significant financial resources (hence > the 300Eur target price), so the following needs to be addressed: Is providing an "NDA-less fab" service using these kits within scope, or would anyone on this list consider providing such a service? I'm asking this for two reasons. First, I'm skeptical about a 300? price target for such a kit, but a fab service would map that cost to a larger number of users. Second, for people like me, even paying 100? for a single prototype is much more appealing than dealing with HF in my basement. Greetings, Martin On Mon, Mar 22, 2021 at 12:49 AM Ferenc ?ger wrote: > Hello Everyone, > > Summary of the Mumble session: > > Participants: eegerferenc, hsank, leviathan, tatzelbrumm > > Agenda: > > - LS50U/MLL: It is proposed to make a maskless exposure unit based on > JBD's uLED panel targeted at 50-100um MFS, and make it available bundled > into a "DIY Microchip Fabrication Kit" containing everything needed for > a basic process. Details discussed so far: > > * Substrate: custom, 1-2cm rectangular "wafers" in order to make > alignment easier and to fit into a small tube furnace. Similar, but > polycrystalline offerings exist for solar panels. Finding and quoting a > supplier is in progress. > > * Exposure: JBD uLED panel + simple projection/reduction optics + > 3D-printed framework for alignment, into which the chips can be slided in. > > * Furnace: cheap second-hand tube furnace, or a tube furnace heater > with retrofitted quartz tube and control electronics (backup plan). > Metal-lined, graphite-lined or gas-heated types are to be avoided due to > contamination issues. > > * Chemicals (HF, B, P, As, acidic cleaning agents, ...): Ordered in > bulk and repackaged for distribution to overcome that chemical reagent > suppliers don't deal with individuals. > > * Funding: Initially, crowdfund with unit price based on the > expectation of at most 2 customers (semiconductor-related crowdfunding > tends to fail), then lower the UP if more customers come. Also, plan B > shall be formulated. > > * Legal background: form a limited-liability company to handle the > stuff. > > Discussion is expected to continue until next Sunday, when things are > expected to be written down. Comments on mailing list or participation > in the Mumble session are welcome. > > Regards, > > Ferenc > > On 20/03/2021 09:29, Hagen SANKOWSKI wrote: > > Hello List! > > > > This is our weekly announcement for the next Mumble Sessions on Sunday > > > > 2021-03-21 @ 18:00 UTC. > > > > Please join us as usual at our Mumble Server murmur.libresilicon.com at > > Port 64738, the Channel is IC. > > > > We like to follow-up our meeting minutes from mumble sessions before. > > > > Regards, > > Hagen. > > _______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers at list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers -------------- next part -------------- An HTML attachment was scrubbed... URL: From pavel at noa-labs.com Fri Apr 2 15:56:05 2021 From: pavel at noa-labs.com (Pavel Nikulin) Date: Fri, 2 Apr 2021 19:56:05 +0600 Subject: [Libre-silicon-devel] Should I join the mumble session this weekend? Message-ID: Hello list, I finally got a first human response from JBD about the matrix. I informed David, and am awaiting his reply. I'd like to speak about about approaching them, and a bit on your funding. I believe you already scoured through all, and everything with regard to funding opportunities, but I believe the big news of the last few months open a few more avenues for you. I believe having to chase funds again will be a big distraction for you, as expected, but the cost benefit on that, and any chance on commercialization fade if not pursued withing months. From eegerferenc at gmail.com Fri Apr 2 17:35:26 2021 From: eegerferenc at gmail.com (=?UTF-8?Q?Ferenc_=c3=89ger?=) Date: Fri, 2 Apr 2021 17:35:26 +0200 Subject: [Libre-silicon-devel] Should I join the mumble session this weekend? In-Reply-To: References: Message-ID: Hello Pavel, You're welcome, I see no reason for you not joining on this weekend. All needed info for setting up Mumble is in the weekly announcement. Regards, Ferenc On 02/04/2021 15:56, Pavel Nikulin wrote: > Hello list, > > I finally got a first human response from JBD about the matrix. I > informed David, and am awaiting his reply. > > I'd like to speak about about approaching them, and a bit on your funding. > > I believe you already scoured through all, and everything with regard > to funding opportunities, but I believe the big news of the last few > months open a few more avenues for you. > > I believe having to chase funds again will be a big distraction for > you, as expected, but the cost benefit on that, and any chance on > commercialization fade if not pursued withing months. > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From eegerferenc at gmail.com Fri Apr 2 17:52:59 2021 From: eegerferenc at gmail.com (=?UTF-8?Q?Ferenc_=c3=89ger?=) Date: Fri, 2 Apr 2021 17:52:59 +0200 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-03-21 @ 18:00 UTC In-Reply-To: References: <0804d473-bcf9-f369-5061-e00537dbb7ac@gmail.com> Message-ID: <9c74a5eb-9afe-70c6-4681-2c45e7877fef@gmail.com> Hello Martin, hello list, Yes, we aim to offer Libresilicon as a manufacturing service. Originally, our plan is two-fold: LS1U is the "real" technology offered for manufacturing. It has 1um MFS, provides full poly-gate CMOS and bipolar primitive components, and comes with fully characterized SPICE models. This is the node intended for prototyping and making working devices. However, its fabrication and quality assurance requires an industrial-scale cleanroom facility, so it is offered primarily as a service. Parallel, LS50U is being worked on as a "toy": it is a 50-100um MFS, metal-gate PMOS-only technology with no poly-Si layer and only a single metal layer. Its primary goal is to serve as an educational tool or "attention-catcher" for the project. Design reproducibility and functionality is not implied or guaranteed, it is not intended for design prototyping at all. Please note that LS50U is not a subset of LS1U, no portability between them is intended. @David: What about providing LS50U also as a service (in addition to the kit)? As a forerunner of LS1U manufacturing service? Regards, Ferenc On 02/04/2021 14:39, Martin Geisse wrote: > Hi, > > > - LS50U/MLL: It is proposed to make a maskless exposure unit based on > > JBD's uLED panel targeted at 50-100um MFS, and make it available bundled > > into a "DIY Microchip Fabrication Kit" containing everything needed for > > a basic process. Details discussed so far: > ... > > Just another two considerations: Our target audience with this kit is > > the unit-radius citizen without significant financial resources (hence > > the 300Eur target price), so the following needs to be addressed: > > Is providing an "NDA-less fab" service using these kits within scope, > or would anyone on this list consider providing such a service? I'm > asking this for two reasons. First, I'm skeptical about a 300? price > target for such a kit, but a fab service would map that cost to a > larger number of users. Second, for people like me, even paying 100? > for a single prototype is much more appealing than dealing with HF in > my basement. > > Greetings, > Martin > > > On Mon, Mar 22, 2021 at 12:49 AM Ferenc ?ger > wrote: > > Hello Everyone, > > Summary of the Mumble session: > > Participants: eegerferenc, hsank, leviathan, tatzelbrumm > > Agenda: > > - LS50U/MLL: It is proposed to make a maskless exposure unit based on > JBD's uLED panel targeted at 50-100um MFS, and make it available > bundled > into a "DIY Microchip Fabrication Kit" containing everything > needed for > a basic process. Details discussed so far: > > ??? * Substrate: custom, 1-2cm rectangular "wafers" in order to make > alignment easier and to fit into a small tube furnace. Similar, but > polycrystalline offerings exist for solar panels. Finding and > quoting a > supplier is in progress. > > ??? * Exposure: JBD uLED panel + simple projection/reduction optics + > 3D-printed framework for alignment, into which the chips can be > slided in. > > ??? * Furnace: cheap second-hand tube furnace, or a tube furnace > heater > with retrofitted quartz tube and control electronics (backup plan). > Metal-lined, graphite-lined or gas-heated types are to be avoided > due to > contamination issues. > > ??? * Chemicals (HF, B, P, As, acidic cleaning agents, ...): > Ordered in > bulk and repackaged for distribution to overcome that chemical > reagent > suppliers don't deal with individuals. > > ??? * Funding: Initially, crowdfund with unit price based on the > expectation of at most 2 customers (semiconductor-related > crowdfunding > tends to fail), then lower the UP if more customers come. Also, > plan B > shall be formulated. > > ??? * Legal background: form a limited-liability company to handle > the > stuff. > > Discussion is expected to continue until next Sunday, when things are > expected to be written down. Comments on mailing list or > participation > in the Mumble session are welcome. > > Regards, > > Ferenc > > On 20/03/2021 09:29, Hagen SANKOWSKI wrote: > > Hello List! > > > > This is our weekly announcement for the next Mumble Sessions on > Sunday > > > >? ? ? ?2021-03-21 @ 18:00 UTC. > > > > Please join us as usual at our Mumble Server > murmur.libresilicon.com at > > Port 64738, the Channel is IC. > > > > We like to follow-up our meeting minutes from mumble sessions > before. > > > > Regards, > > Hagen. > > _______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers at list.libresilicon.com > > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers -------------- next part -------------- An HTML attachment was scrubbed... URL: From martingeisse at googlemail.com Fri Apr 2 19:51:26 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Fri, 2 Apr 2021 19:51:26 +0200 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-03-21 @ 18:00 UTC In-Reply-To: <9c74a5eb-9afe-70c6-4681-2c45e7877fef@gmail.com> References: <0804d473-bcf9-f369-5061-e00537dbb7ac@gmail.com> <9c74a5eb-9afe-70c6-4681-2c45e7877fef@gmail.com> Message-ID: Hello Ferenc, thank you for the quick reply. LS50U as a service is definitely something I would pay for, though obviously less than for LS1U. Since it is a toy anyway, reliable performance and SPICE models are less important that having a hobbyist-friendly packaging (preferably DIP) included in the service. Greetings, Martin On Fri, Apr 2, 2021 at 5:53 PM Ferenc ?ger wrote: > Hello Martin, hello list, > > Yes, we aim to offer Libresilicon as a manufacturing service. Originally, > our plan is two-fold: > > LS1U is the "real" technology offered for manufacturing. It has 1um MFS, > provides full poly-gate CMOS and bipolar primitive components, and comes > with fully characterized SPICE models. This is the node intended for > prototyping and making working devices. However, its fabrication and > quality assurance requires an industrial-scale cleanroom facility, so it is > offered primarily as a service. > > Parallel, LS50U is being worked on as a "toy": it is a 50-100um MFS, > metal-gate PMOS-only technology with no poly-Si layer and only a single > metal layer. Its primary goal is to serve as an educational tool or > "attention-catcher" for the project. Design reproducibility and > functionality is not implied or guaranteed, it is not intended for design > prototyping at all. > > Please note that LS50U is not a subset of LS1U, no portability between > them is intended. > > @David: What about providing LS50U also as a service (in addition to the > kit)? As a forerunner of LS1U manufacturing service? > > Regards, > > Ferenc > On 02/04/2021 14:39, Martin Geisse wrote: > > Hi, > > > - LS50U/MLL: It is proposed to make a maskless exposure unit based on > > JBD's uLED panel targeted at 50-100um MFS, and make it available bundled > > into a "DIY Microchip Fabrication Kit" containing everything needed for > > a basic process. Details discussed so far: > ... > > Just another two considerations: Our target audience with this kit is > > the unit-radius citizen without significant financial resources (hence > > the 300Eur target price), so the following needs to be addressed: > > Is providing an "NDA-less fab" service using these kits within scope, or > would anyone on this list consider providing such a service? I'm asking > this for two reasons. First, I'm skeptical about a 300? price target for > such a kit, but a fab service would map that cost to a larger number of > users. Second, for people like me, even paying 100? for a single prototype > is much more appealing than dealing with HF in my basement. > > Greetings, > Martin > > > On Mon, Mar 22, 2021 at 12:49 AM Ferenc ?ger > wrote: > >> Hello Everyone, >> >> Summary of the Mumble session: >> >> Participants: eegerferenc, hsank, leviathan, tatzelbrumm >> >> Agenda: >> >> - LS50U/MLL: It is proposed to make a maskless exposure unit based on >> JBD's uLED panel targeted at 50-100um MFS, and make it available bundled >> into a "DIY Microchip Fabrication Kit" containing everything needed for >> a basic process. Details discussed so far: >> >> * Substrate: custom, 1-2cm rectangular "wafers" in order to make >> alignment easier and to fit into a small tube furnace. Similar, but >> polycrystalline offerings exist for solar panels. Finding and quoting a >> supplier is in progress. >> >> * Exposure: JBD uLED panel + simple projection/reduction optics + >> 3D-printed framework for alignment, into which the chips can be slided in. >> >> * Furnace: cheap second-hand tube furnace, or a tube furnace heater >> with retrofitted quartz tube and control electronics (backup plan). >> Metal-lined, graphite-lined or gas-heated types are to be avoided due to >> contamination issues. >> >> * Chemicals (HF, B, P, As, acidic cleaning agents, ...): Ordered in >> bulk and repackaged for distribution to overcome that chemical reagent >> suppliers don't deal with individuals. >> >> * Funding: Initially, crowdfund with unit price based on the >> expectation of at most 2 customers (semiconductor-related crowdfunding >> tends to fail), then lower the UP if more customers come. Also, plan B >> shall be formulated. >> >> * Legal background: form a limited-liability company to handle the >> stuff. >> >> Discussion is expected to continue until next Sunday, when things are >> expected to be written down. Comments on mailing list or participation >> in the Mumble session are welcome. >> >> Regards, >> >> Ferenc >> >> On 20/03/2021 09:29, Hagen SANKOWSKI wrote: >> > Hello List! >> > >> > This is our weekly announcement for the next Mumble Sessions on Sunday >> > >> > 2021-03-21 @ 18:00 UTC. >> > >> > Please join us as usual at our Mumble Server murmur.libresilicon.com at >> > Port 64738, the Channel is IC. >> > >> > We like to follow-up our meeting minutes from mumble sessions before. >> > >> > Regards, >> > Hagen. >> > _______________________________________________ >> > Libresilicon-developers mailing list >> > Libresilicon-developers at list.libresilicon.com >> > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers >> _______________________________________________ >> Libresilicon-developers mailing list >> Libresilicon-developers at list.libresilicon.com >> https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > _______________________________________________ > Libresilicon-developers mailing listLibresilicon-developers at list.libresilicon.comhttps://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From leviathan at libresilicon.com Fri Apr 2 20:01:42 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Fri, 02 Apr 2021 19:01:42 +0100 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-03-21 @ 18:00 UTC In-Reply-To: References: <9c74a5eb-9afe-70c6-4681-2c45e7877fef@gmail.com> Message-ID: <4631369.lRROr62Keh@harvey> Hi So, considering that at the end of this month I'll have a new, even bigger apartment than currently with a garage and a fire place included (for 150 bucks less than I pay currently per month!!!), I'll have enough space to start working on our mini clean room glove box design, for manufacturing chips. I agree, I've checked online. I did find some inexpensive electric desktop furnaces, but they're all more expensive than 300 Euros. However, assuming that I get one of those microLED displays for building a maskless lithography system for those benches, it should become possible for me to provide such a service at home. Considering that such a glove box design has much less air to clean, it might actually be possible to achieve a cleanliness level inside there for achieving ever smaller feature sizes, assuming we can come up with a stepping capable exposure unit, or with a fixed one, which has a higher amount of pixels and a suitable aperture. Cheers -lev On Friday, April 2, 2021 6:51:26 PM WEST Martin Geisse wrote: > Hello Ferenc, > > thank you for the quick reply. > > LS50U as a service is definitely something I would pay for, though > obviously less than for LS1U. Since it is a toy anyway, reliable > performance and SPICE models are less important that having a > hobbyist-friendly packaging (preferably DIP) included in the service. > > Greetings, > Martin > > On Fri, Apr 2, 2021 at 5:53 PM Ferenc ?ger wrote: > > Hello Martin, hello list, > > > > Yes, we aim to offer Libresilicon as a manufacturing service. Originally, > > our plan is two-fold: > > > > LS1U is the "real" technology offered for manufacturing. It has 1um MFS, > > provides full poly-gate CMOS and bipolar primitive components, and comes > > with fully characterized SPICE models. This is the node intended for > > prototyping and making working devices. However, its fabrication and > > quality assurance requires an industrial-scale cleanroom facility, so it > > is > > offered primarily as a service. > > > > Parallel, LS50U is being worked on as a "toy": it is a 50-100um MFS, > > metal-gate PMOS-only technology with no poly-Si layer and only a single > > metal layer. Its primary goal is to serve as an educational tool or > > "attention-catcher" for the project. Design reproducibility and > > functionality is not implied or guaranteed, it is not intended for design > > prototyping at all. > > > > Please note that LS50U is not a subset of LS1U, no portability between > > them is intended. > > > > @David: What about providing LS50U also as a service (in addition to the > > kit)? As a forerunner of LS1U manufacturing service? > > > > Regards, > > > > Ferenc > > On 02/04/2021 14:39, Martin Geisse wrote: > > > > Hi, > > > > > - LS50U/MLL: It is proposed to make a maskless exposure unit based on > > > JBD's uLED panel targeted at 50-100um MFS, and make it available bundled > > > into a "DIY Microchip Fabrication Kit" containing everything needed for > > > > > a basic process. Details discussed so far: > > ... > > > > > Just another two considerations: Our target audience with this kit is > > > the unit-radius citizen without significant financial resources (hence > > > > > the 300Eur target price), so the following needs to be addressed: > > Is providing an "NDA-less fab" service using these kits within scope, or > > would anyone on this list consider providing such a service? I'm asking > > this for two reasons. First, I'm skeptical about a 300? price target for > > such a kit, but a fab service would map that cost to a larger number of > > users. Second, for people like me, even paying 100? for a single prototype > > is much more appealing than dealing with HF in my basement. > > > > Greetings, > > Martin > > > > > > On Mon, Mar 22, 2021 at 12:49 AM Ferenc ?ger > > > > wrote: > >> Hello Everyone, > >> > >> Summary of the Mumble session: > >> > >> Participants: eegerferenc, hsank, leviathan, tatzelbrumm > >> > >> Agenda: > >> > >> - LS50U/MLL: It is proposed to make a maskless exposure unit based on > >> JBD's uLED panel targeted at 50-100um MFS, and make it available bundled > >> into a "DIY Microchip Fabrication Kit" containing everything needed for > >> > >> a basic process. Details discussed so far: > >> * Substrate: custom, 1-2cm rectangular "wafers" in order to make > >> > >> alignment easier and to fit into a small tube furnace. Similar, but > >> polycrystalline offerings exist for solar panels. Finding and quoting a > >> supplier is in progress. > >> > >> * Exposure: JBD uLED panel + simple projection/reduction optics + > >> > >> 3D-printed framework for alignment, into which the chips can be slided > >> in. > >> > >> * Furnace: cheap second-hand tube furnace, or a tube furnace heater > >> > >> with retrofitted quartz tube and control electronics (backup plan). > >> Metal-lined, graphite-lined or gas-heated types are to be avoided due to > >> contamination issues. > >> > >> * Chemicals (HF, B, P, As, acidic cleaning agents, ...): Ordered in > >> > >> bulk and repackaged for distribution to overcome that chemical reagent > >> suppliers don't deal with individuals. > >> > >> * Funding: Initially, crowdfund with unit price based on the > >> > >> expectation of at most 2 customers (semiconductor-related crowdfunding > >> tends to fail), then lower the UP if more customers come. Also, plan B > >> shall be formulated. > >> > >> * Legal background: form a limited-liability company to handle the > >> > >> stuff. > >> > >> Discussion is expected to continue until next Sunday, when things are > >> expected to be written down. Comments on mailing list or participation > >> in the Mumble session are welcome. > >> > >> Regards, > >> > >> Ferenc > >> > >> On 20/03/2021 09:29, Hagen SANKOWSKI wrote: > >> > Hello List! > >> > > >> > This is our weekly announcement for the next Mumble Sessions on Sunday > >> > > >> > 2021-03-21 @ 18:00 UTC. > >> > > >> > Please join us as usual at our Mumble Server murmur.libresilicon.com at > >> > Port 64738, the Channel is IC. > >> > > >> > We like to follow-up our meeting minutes from mumble sessions before. > >> > > >> > Regards, > >> > Hagen. > >> > _______________________________________________ > >> > Libresilicon-developers mailing list > >> > Libresilicon-developers at list.libresilicon.com > >> > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > >> > >> _______________________________________________ > >> Libresilicon-developers mailing list > >> Libresilicon-developers at list.libresilicon.com > >> https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > > _______________________________________________ > > Libresilicon-developers mailing > > listLibresilicon-developers at list.libresilicon.comhttps://list.libresilico > > n.com/mailman/listinfo/libresilicon-developers From luke.leighton at gmail.com Fri Apr 2 20:39:23 2021 From: luke.leighton at gmail.com (lkcl) Date: Fri, 2 Apr 2021 19:39:23 +0100 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-03-21 @ 18:00 UTC In-Reply-To: <2983109.9zlIi9hSbk@harvey> References: <9c4b6387-0217-4737-a883-53049c47234f@gmail.com> <2983109.9zlIi9hSbk@harvey> Message-ID: On Friday, March 26, 2021, David Lanzend?rfer wrote: > > entity... Yeah. Maybe we need to found something like a company > in order to do trading. set up a Community Interest Company as a holding company and if absolutely necessary create subsidiaries. a CIC may own a PLC but not the other way round. l. -------------- next part -------------- An HTML attachment was scrubbed... URL: From eegerferenc at gmail.com Fri Apr 2 23:42:08 2021 From: eegerferenc at gmail.com (=?UTF-8?Q?Ferenc_=c3=89ger?=) Date: Fri, 2 Apr 2021 23:42:08 +0200 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-03-21 @ 18:00 UTC In-Reply-To: <4631369.lRROr62Keh@harvey> References: <9c74a5eb-9afe-70c6-4681-2c45e7877fef@gmail.com> <4631369.lRROr62Keh@harvey> Message-ID: <41ed9998-b228-b2e6-1c73-0b335534d437@gmail.com> Hello Everyone, "or with a fixed one, which has a higher amount of pixels and a suitable aperture." In my opinion, the pixel density of 2,5um/px of current JBD models is satisfactory for down to 5um MFS without reduction. The limiting problem is the focus and overlay accuracy here. To overcome that, we will need e.g. a machined steel block holding both the wafer and the projection optics instead of a 3D-printed frame. Or, we can use a stock stereomicroscope plus an X-Y-theta positioner with one ocular modified to accommodate the imager while the other is used for manual alignment and focus. On 02/04/2021 20:01, David Lanzend?rfer wrote: > Hi > So, considering that at the end of this month I'll have a new, even bigger > apartment than currently with a garage and a fire place included (for 150 > bucks less than I pay currently per month!!!), I'll have enough space to start > working on our mini clean room glove box design, for manufacturing chips. > I agree, I've checked online. I did find some inexpensive electric desktop > furnaces, but they're all more expensive than 300 Euros. > However, assuming that I get one of those microLED displays for building > a maskless lithography system for those benches, it should become possible > for me to provide such a service at home. > Considering that such a glove box design has much less air to clean, it might > actually be possible to achieve a cleanliness level inside there for achieving > ever smaller feature sizes, assuming we can come up with a stepping capable > exposure unit, or with a fixed one, which has a higher amount of pixels and > a suitable aperture. > > Cheers > -lev > > On Friday, April 2, 2021 6:51:26 PM WEST Martin Geisse wrote: >> Hello Ferenc, >> >> thank you for the quick reply. >> >> LS50U as a service is definitely something I would pay for, though >> obviously less than for LS1U. Since it is a toy anyway, reliable >> performance and SPICE models are less important that having a >> hobbyist-friendly packaging (preferably DIP) included in the service. >> >> Greetings, >> Martin >> >> On Fri, Apr 2, 2021 at 5:53 PM Ferenc ?ger wrote: >>> Hello Martin, hello list, >>> >>> Yes, we aim to offer Libresilicon as a manufacturing service. Originally, >>> our plan is two-fold: >>> >>> LS1U is the "real" technology offered for manufacturing. It has 1um MFS, >>> provides full poly-gate CMOS and bipolar primitive components, and comes >>> with fully characterized SPICE models. This is the node intended for >>> prototyping and making working devices. However, its fabrication and >>> quality assurance requires an industrial-scale cleanroom facility, so it >>> is >>> offered primarily as a service. >>> >>> Parallel, LS50U is being worked on as a "toy": it is a 50-100um MFS, >>> metal-gate PMOS-only technology with no poly-Si layer and only a single >>> metal layer. Its primary goal is to serve as an educational tool or >>> "attention-catcher" for the project. Design reproducibility and >>> functionality is not implied or guaranteed, it is not intended for design >>> prototyping at all. >>> >>> Please note that LS50U is not a subset of LS1U, no portability between >>> them is intended. >>> >>> @David: What about providing LS50U also as a service (in addition to the >>> kit)? As a forerunner of LS1U manufacturing service? >>> >>> Regards, >>> >>> Ferenc >>> On 02/04/2021 14:39, Martin Geisse wrote: >>> >>> Hi, >>> >>>> - LS50U/MLL: It is proposed to make a maskless exposure unit based on >>>> JBD's uLED panel targeted at 50-100um MFS, and make it available bundled >>>> into a "DIY Microchip Fabrication Kit" containing everything needed for >>>> a basic process. Details discussed so far: >>> ... >>> >>>> Just another two considerations: Our target audience with this kit is >>>> the unit-radius citizen without significant financial resources (hence >>>> the 300Eur target price), so the following needs to be addressed: >>> Is providing an "NDA-less fab" service using these kits within scope, or >>> would anyone on this list consider providing such a service? I'm asking >>> this for two reasons. First, I'm skeptical about a 300? price target for >>> such a kit, but a fab service would map that cost to a larger number of >>> users. Second, for people like me, even paying 100? for a single prototype >>> is much more appealing than dealing with HF in my basement. >>> >>> Greetings, >>> Martin >>> >>> >>> On Mon, Mar 22, 2021 at 12:49 AM Ferenc ?ger >>> >>> wrote: >>>> Hello Everyone, >>>> >>>> Summary of the Mumble session: >>>> >>>> Participants: eegerferenc, hsank, leviathan, tatzelbrumm >>>> >>>> Agenda: >>>> >>>> - LS50U/MLL: It is proposed to make a maskless exposure unit based on >>>> JBD's uLED panel targeted at 50-100um MFS, and make it available bundled >>>> into a "DIY Microchip Fabrication Kit" containing everything needed for >>>> >>>> a basic process. Details discussed so far: >>>> * Substrate: custom, 1-2cm rectangular "wafers" in order to make >>>> >>>> alignment easier and to fit into a small tube furnace. Similar, but >>>> polycrystalline offerings exist for solar panels. Finding and quoting a >>>> supplier is in progress. >>>> >>>> * Exposure: JBD uLED panel + simple projection/reduction optics + >>>> >>>> 3D-printed framework for alignment, into which the chips can be slided >>>> in. >>>> >>>> * Furnace: cheap second-hand tube furnace, or a tube furnace heater >>>> >>>> with retrofitted quartz tube and control electronics (backup plan). >>>> Metal-lined, graphite-lined or gas-heated types are to be avoided due to >>>> contamination issues. >>>> >>>> * Chemicals (HF, B, P, As, acidic cleaning agents, ...): Ordered in >>>> >>>> bulk and repackaged for distribution to overcome that chemical reagent >>>> suppliers don't deal with individuals. >>>> >>>> * Funding: Initially, crowdfund with unit price based on the >>>> >>>> expectation of at most 2 customers (semiconductor-related crowdfunding >>>> tends to fail), then lower the UP if more customers come. Also, plan B >>>> shall be formulated. >>>> >>>> * Legal background: form a limited-liability company to handle the >>>> >>>> stuff. >>>> >>>> Discussion is expected to continue until next Sunday, when things are >>>> expected to be written down. Comments on mailing list or participation >>>> in the Mumble session are welcome. >>>> >>>> Regards, >>>> >>>> Ferenc >>>> >>>> On 20/03/2021 09:29, Hagen SANKOWSKI wrote: >>>>> Hello List! >>>>> >>>>> This is our weekly announcement for the next Mumble Sessions on Sunday >>>>> >>>>> 2021-03-21 @ 18:00 UTC. >>>>> >>>>> Please join us as usual at our Mumble Server murmur.libresilicon.com at >>>>> Port 64738, the Channel is IC. >>>>> >>>>> We like to follow-up our meeting minutes from mumble sessions before. >>>>> >>>>> Regards, >>>>> Hagen. >>>>> _______________________________________________ >>>>> Libresilicon-developers mailing list >>>>> Libresilicon-developers at list.libresilicon.com >>>>> https://list.libresilicon.com/mailman/listinfo/libresilicon-developers >>>> _______________________________________________ >>>> Libresilicon-developers mailing list >>>> Libresilicon-developers at list.libresilicon.com >>>> https://list.libresilicon.com/mailman/listinfo/libresilicon-developers >>> _______________________________________________ >>> Libresilicon-developers mailing >>> listLibresilicon-developers at list.libresilicon.comhttps://list.libresilico >>> n.com/mailman/listinfo/libresilicon-developers > > > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From pavel at noa-labs.com Sun Apr 4 21:57:00 2021 From: pavel at noa-labs.com (Pavel Nikulin) Date: Mon, 5 Apr 2021 01:57:00 +0600 Subject: [Libre-silicon-devel] Should I join the mumble session this weekend? In-Reply-To: References: Message-ID: Hi Ferenc, We spoke today a bit about the uLED matrix option. The price of the matter is $4000-$5000 for a prototype from their first tape out, which does not compare favourably with an option of a second hand DLP projector with mercury lamp. I delivered a brief about the uLED thing in question. Key points: 1. JBD uses a bonding process to glue together a GaN layer from sapphire carrier wafer, on top of silicon wafer with BEOL, and FEOL. In other words, only the LEDs themselves are GaN. 2. That is very different from uLEDs with where GaN is grown on Si, or where BEOL, and FEOL are patterned on the same sapphire substrate. That results in vastly superior LED quality, and blowing nearest competitors by millions of nits. Serious wattage from this thing is possible. 3. The guy in question, Li Qiming, may well be the only man in the world with a machine which can glue III-V to Si in serious commercial volumes today. This is also the biggest showstopper. Hagen gave a good analogy with litho equipment on the market to cars: if second hand litho machines which used to be on the market were cars, then the cheapest one would've been a second hand Ferrari, while we are trying to build a bicycle. I then said that even second hand bicycles would be freaking expensive. Second hand bicycles in question would be other single shot exposure machines. While I keep optimism about uLED matrix, I agree that a DLP projector with a UV lamp would probably be the best for this "bicycle" stage. Ferenc, what I wanted to ask you as a man with the best optics knowledge here: 1. Do you think a uLED matrix with micro-reflectors the like one JBD has be suitable for a proximity lithography? 2. Do you think it is possible for mortals to make this uLED matrix to work in a scanning mode (like in a scanner vs a stepper) if it can be driven fast enough? Later we spoke about new funding options. A new humongous fund called NGEU is now being created https://en.wikipedia.org/wiki/Next_Generation_EU which will bring $5B additional funding to Horizon Europe over 2 years. This will also be accompanied by a yet to materialise EU semiconductor fund, which will be many times bigger. In light of this, I noted that with so much money flying around, it may well be harder to secure funding for a "bicycle" project than a "Ferrari" project, meaning that funding for something more substantial may be easier to get under current circumstances, despite it not being the current aim of the project. I myself would've exploited every possible opportunity out of the fact that EU politicians are now peeing molten lead over chip shortages. From leviathan at libresilicon.com Sun Apr 4 22:42:42 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Sun, 04 Apr 2021 21:42:42 +0100 Subject: [Libre-silicon-devel] GloveBox Message-ID: <3947438.lAOvbN6Cc6@harvey> Hi So I'm right now tinkering together the GloveBox in FreeCAD. Attached is a little preview. Material wise we're much cheaper than the alternatives found on global supply[1], since I'm using standard aluminum profiles, acrylic glas and other off the shelf materials like perforated aluminum sheets[2], and for the air filtration I will use an inexpensive pump with HEPA filter from eBay[3]. Cheers -lev [1] https://www.globallabsupply.com/Two-Port-Simple-Closed-Loop-Glovebox-Acrlic-p/2400-2-a.htm [2] https://hardware-warehouse.co.uk/Round-Perforated-Anodised-Aluminium-Sheet-1mm-1m-500mm-1mm [3] https://www.ebay.com/p/19020368277?iid=373004598128 -------------- next part -------------- A non-text attachment was scrubbed... Name: screeny.png Type: image/png Size: 70710 bytes Desc: not available URL: From leviathan at libresilicon.com Mon Apr 5 13:07:10 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Mon, 05 Apr 2021 12:07:10 +0100 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: <3947438.lAOvbN6Cc6@harvey> References: <3947438.lAOvbN6Cc6@harvey> Message-ID: <1734142.TXFL9qJUc6@harvey> Hi So I'm a bit further in the planning phase, and it's now a fact that you can build a pretty good inexpensive closed loop system with a very low budget. For blowing the air up from the bottom and in order to suck it in at the top, I'll order a box of those cheap CPU chasis fans here: https://www.cclonline.com/product/277876/N51QT/Chassis-Case-Fans/Maplin-80mm-Black-Chassis-Fan-with-3Pin-4Pin-Male-Female-Connector/CLR1965/ The air duct can be done with... well... an air duct... https://www.ebay.ie/itm/Aluminium-Flexible-Hose-Alloy-Air-Duct-Tube-Flexi-Pipe/254900078406 The perforated aluminum sheets are cheap as hell as well... https://hardware-warehouse.co.uk/Round-Perforated-Anodised-Aluminium-Sheet-1mm-1m-500mm-1mm So are the HEPA filters: https://www.ebay.ie/itm/AREBOS-Hepa-Filter-Staubsauger-Geeignet-fur-Industriestaubsauger-1800W/184489133876 The only difficult part, which isn't cheap and easy available for sourcing is the globes for the glove box, so I'll probably have to find a way in order to make that myself somehow... Cheers -lev On Sunday, April 4, 2021 9:42:42 PM WEST David Lanzend?rfer wrote: > Hi > So I'm right now tinkering together the GloveBox in FreeCAD. > Attached is a little preview. > Material wise we're much cheaper than the alternatives found on global > supply[1], since I'm using standard aluminum profiles, acrylic glas and > other off the shelf materials like perforated aluminum sheets[2], and for > the air filtration I will use an inexpensive pump with HEPA filter from > eBay[3]. > > Cheers > -lev > > [1] > https://www.globallabsupply.com/Two-Port-Simple-Closed-Loop-Glovebox-Acrlic > -p/2400-2-a.htm [2] > https://hardware-warehouse.co.uk/Round-Perforated-Anodised-Aluminium-Sheet-> 1mm-1m-500mm-1mm [3] https://www.ebay.com/p/19020368277?iid=373004598128 From leviathan at libresilicon.com Mon Apr 5 13:15:59 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Mon, 05 Apr 2021 12:15:59 +0100 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: <1734142.TXFL9qJUc6@harvey> References: <3947438.lAOvbN6Cc6@harvey> <1734142.TXFL9qJUc6@harvey> Message-ID: <2453155.kRDWQI2yTV@harvey> Another update: Big gloves exist on eBay. So easy peacy lemon squeezy. As soon as I've moved into the new apartment with the garage, I should have this glove box done in no time. Right now checking with Leon and Pavel whether there's an alternative to the UV LED matrix which isn't frigging expensive. I'm not willing nor am I able to pay 4150 USD for a chip in a prototype, especially because of the fact that I know that the first few attempts of making a PCB might go up in flames. Cheers -lev On Monday, April 5, 2021 12:07:10 PM WEST David Lanzend?rfer wrote: > Hi > So I'm a bit further in the planning phase, and it's now a fact that you can > build a pretty good inexpensive closed loop system with a very low budget. > > For blowing the air up from the bottom and in order to suck it in at the > top, I'll order a box of those cheap CPU chasis fans here: > https://www.cclonline.com/product/277876/N51QT/Chassis-Case-Fans/Maplin-80mm > -Black-Chassis-Fan-with-3Pin-4Pin-Male-Female-Connector/CLR1965/ The air > duct can be done with... well... an air duct... > https://www.ebay.ie/itm/Aluminium-Flexible-Hose-Alloy-Air-Duct-Tube-Flexi-Pi > pe/254900078406 The perforated aluminum sheets are cheap as hell as well... > https://hardware-warehouse.co.uk/Round-Perforated-Anodised-Aluminium-Sheet-1 > mm-1m-500mm-1mm So are the HEPA filters: > https://www.ebay.ie/itm/AREBOS-Hepa-Filter-Staubsauger-Geeignet-fur-Industri > estaubsauger-1800W/184489133876 > > The only difficult part, which isn't cheap and easy available for sourcing > is the globes for the glove box, so I'll probably have to find a way in > order to make that myself somehow... > > Cheers > -lev > > On Sunday, April 4, 2021 9:42:42 PM WEST David Lanzend?rfer wrote: > > Hi > > So I'm right now tinkering together the GloveBox in FreeCAD. > > Attached is a little preview. > > Material wise we're much cheaper than the alternatives found on global > > supply[1], since I'm using standard aluminum profiles, acrylic glas and > > other off the shelf materials like perforated aluminum sheets[2], and for > > the air filtration I will use an inexpensive pump with HEPA filter from > > eBay[3]. > > > > Cheers > > -lev > > > > [1] > > https://www.globallabsupply.com/Two-Port-Simple-Closed-Loop-Glovebox-Acrli > > c > > -p/2400-2-a.htm [2] > > https://hardware-warehouse.co.uk/Round-Perforated-Anodised-Aluminium-Sheet > > -> 1mm-1m-500mm-1mm [3] > > https://www.ebay.com/p/19020368277?iid=373004598128 From leviathan at libresilicon.com Mon Apr 5 19:15:25 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Mon, 05 Apr 2021 18:15:25 +0100 Subject: [Libre-silicon-devel] Maskless Lithography Message-ID: <9352751.nj06mzZhW0@harvey> Hi So Mouser has DMD chips from Texas Instruments, with multiple of those chips you already can achieve around 20 micron feature sizes and lower on a 1cm x 1cm die... For 50 Euros a chip... NOT 4000 Euros... I think it's a no brainer to run with DMD chips for now... Cheers -lev From leviathan at libresilicon.com Wed Apr 7 14:43:33 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Wed, 07 Apr 2021 13:43:33 +0100 Subject: [Libre-silicon-devel] Stepper, DMD chip Message-ID: <2277515.c54Z9RL92g@harvey> Hi What do you think about using the DLP2000 for the first version of my exposure unit? It could already make structures down to 50um with a die size of 1cm x 1cm Cheers -lev -------------- next part -------------- A non-text attachment was scrubbed... Name: dlp2000.pdf Type: application/pdf Size: 537688 bytes Desc: not available URL: From leviathan at libresilicon.com Thu Apr 8 13:32:24 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Thu, 08 Apr 2021 12:32:24 +0100 Subject: [Libre-silicon-devel] Lifespan & UV Message-ID: <1861763.LdSb0khDVW@harvey> Hi So in the data sheet of the DLP2000 they say that UV light will reduce the life span of the DMD chip. However. Sam Zeloof is using a DMD display from an overhead projector and it seems to be working ok. Should I take the chance and take this 30 Euro chips from Mouser, although the data sheet says, UV wouldn't be advised? I mean, I still can replace the chip afterwards through a more expensive UV chip, when the rest of the machine works... Cheers -lev From martingeisse at googlemail.com Thu Apr 8 13:58:08 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Thu, 8 Apr 2021 13:58:08 +0200 Subject: [Libre-silicon-devel] Lifespan & UV In-Reply-To: <1861763.LdSb0khDVW@harvey> References: <1861763.LdSb0khDVW@harvey> Message-ID: Hi David, is there a need to use UV light, e.g. does the photoresist need UV to react? Blue or white light would not only be more friendly to the DMD chip but also require less precautions, be directly visible with a microscope for alignment and checking (or at 50u, maybe even a good magnifying glass), etc. At least at 50u the wavelength will be much smaller so sharpness or diffraction isn't a concern. If you really need UV, I'd suggest using a socket so you can at least replace the DMD chip when it breaks. 30-50? is okay-ish to try if it survives "long enough" on average. Greetings, Martin On Thu, Apr 8, 2021 at 1:32 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Hi > So in the data sheet of the DLP2000 they say that UV light will reduce the > life span of the DMD chip. > However. Sam Zeloof is using a DMD display from an overhead projector > and it seems to be working ok. > Should I take the chance and take this 30 Euro chips from Mouser, although > the data sheet says, UV wouldn't be advised? > I mean, I still can replace the chip afterwards through a more expensive > UV chip, when the rest of the machine works... > > Cheers > -lev > > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > -------------- next part -------------- An HTML attachment was scrubbed... URL: From leviathan at libresilicon.com Thu Apr 8 14:04:26 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Thu, 08 Apr 2021 13:04:26 +0100 Subject: [Libre-silicon-devel] Lifespan & UV In-Reply-To: References: <1861763.LdSb0khDVW@harvey> Message-ID: <3504042.DotYG6TCvu@harvey> Hi Martin There's a patent for a very easy to use resist which can be used with visible light, but I've got to do some digging on what suppliers produce it: https://patents.google.com/patent/US7354692B2/en Visible light resist would clearly be preferable, because then the DMD would need to be operated outside of the intended specs. Cheers -lev On Thursday, April 8, 2021 12:58:08 PM WEST Martin Geisse wrote: > Hi David, > > is there a need to use UV light, e.g. does the photoresist need UV to > react? Blue or white light would not only be more friendly to the DMD chip > but also require less precautions, be directly visible with a microscope > for alignment and checking (or at 50u, maybe even a good magnifying glass), > etc. > > At least at 50u the wavelength will be much smaller so sharpness or > diffraction isn't a concern. > > If you really need UV, I'd suggest using a socket so you can at least > replace the DMD chip when it breaks. 30-50? is okay-ish to try if it > survives "long enough" on average. > > Greetings, > Martin > > > On Thu, Apr 8, 2021 at 1:32 PM David Lanzend?rfer < > > leviathan at libresilicon.com> wrote: > > Hi > > So in the data sheet of the DLP2000 they say that UV light will reduce the > > life span of the DMD chip. > > However. Sam Zeloof is using a DMD display from an overhead projector > > and it seems to be working ok. > > Should I take the chance and take this 30 Euro chips from Mouser, although > > the data sheet says, UV wouldn't be advised? > > I mean, I still can replace the chip afterwards through a more expensive > > UV chip, when the rest of the machine works... > > > > Cheers > > -lev > > > > _______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers at list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From martingeisse at googlemail.com Thu Apr 8 15:08:35 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Thu, 8 Apr 2021 15:08:35 +0200 Subject: [Libre-silicon-devel] Lifespan & UV In-Reply-To: <3504042.DotYG6TCvu@harvey> References: <1861763.LdSb0khDVW@harvey> <3504042.DotYG6TCvu@harvey> Message-ID: Hi David, I have to admit that using visible light was probably a stupid idea. There seem to be some more photoresists that are somewhat sensitive to visible blue/violet [1], but they seem hard to get. So back to the idea of using a chip socket so the DMD can be replaced when UV breaks it: This will allow to learn not only about how well the DMD takes UV, but also about the failure modes. For example, blurring the image a bit is probably not as bad, and even faulty pixels are covered by typical design rules (taking MOSIS SCMOS as an example). OTOH if the electronics of the DMD get faulty, it's probably game over. Those are things the datasheet probably won't tell you, so trying it the only way to find out. Another idea would be test patterns using visible light. If the DMD degrades gradually, a test pattern would allow to find out if it is still usable or not. By that, a degraded DMD is no longer a catastrophic event, but rather is part of the expected lifetime of the DIY kit and allows to factor the price of the DMD into the price of the service, mapped over the number of dies produced with it. For example, if the DMD can shoot 100 images before it breaks, and costs 50?, it's 0,50? per image or 2? per die if you need 4 photolitho'd layers. (BTW, the datasheet only says that bright UV and simultaneous temperatures > 70?C are harmful, so that might mean that nothing bad will happen if you just don't stress the DMD too much) [1] https://www.lithoprotect.com/en/worth-knowing/ Greetings, Martin On Thu, Apr 8, 2021 at 2:04 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Hi Martin > There's a patent for a very easy to use resist which can be used with > visible light, but I've got to do some digging on what suppliers produce > it: > https://patents.google.com/patent/US7354692B2/en > Visible light resist would clearly be preferable, because then the DMD > would need to be operated outside of the intended specs. > > Cheers > -lev > > On Thursday, April 8, 2021 12:58:08 PM WEST Martin Geisse wrote: > > Hi David, > > > > is there a need to use UV light, e.g. does the photoresist need UV to > > react? Blue or white light would not only be more friendly to the DMD > chip > > but also require less precautions, be directly visible with a microscope > > for alignment and checking (or at 50u, maybe even a good magnifying > glass), > > etc. > > > > At least at 50u the wavelength will be much smaller so sharpness or > > diffraction isn't a concern. > > > > If you really need UV, I'd suggest using a socket so you can at least > > replace the DMD chip when it breaks. 30-50? is okay-ish to try if it > > survives "long enough" on average. > > > > Greetings, > > Martin > > > > > > On Thu, Apr 8, 2021 at 1:32 PM David Lanzend?rfer < > > > > leviathan at libresilicon.com> wrote: > > > Hi > > > So in the data sheet of the DLP2000 they say that UV light will reduce > the > > > life span of the DMD chip. > > > However. Sam Zeloof is using a DMD display from an overhead projector > > > and it seems to be working ok. > > > Should I take the chance and take this 30 Euro chips from Mouser, > although > > > the data sheet says, UV wouldn't be advised? > > > I mean, I still can replace the chip afterwards through a more > expensive > > > UV chip, when the rest of the machine works... > > > > > > Cheers > > > -lev > > > > > > _______________________________________________ > > > Libresilicon-developers mailing list > > > Libresilicon-developers at list.libresilicon.com > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From ludwig.jaffe at gmail.com Thu Apr 8 19:01:50 2021 From: ludwig.jaffe at gmail.com (ludwig jaffe) Date: Thu, 8 Apr 2021 19:01:50 +0200 Subject: [Libre-silicon-devel] Lifespan & UV -> Go green Message-ID: Hi all, today I talked to a co-worker of mine Shakor who designs optical stuff, and he explained to me, that using UV is a very bad idea, as it destroys everything, also lenses! "Our chips are the biggest". Go for bigger structures for the start, so use green light for example. Here one could also experiment with lens assemblies made for professional cameras like old M42 lenses made by Leiz, and Zeiss Jena. Also the DLP chip is not nice for our application as we do not need a 3 color LED drive embedded in the chip as we have only one wave length and so we dont do RGB and we dont need a sync between LED and DLP. So go for higher resolution "monochrome" just the mirrors, e.g. 2K Very important is to get a uniform intensity, which requires a special lens assembly as one needs to transform the gaussian-curve intensity diagram of any LED into a square diagram as this square intensity is projected to the mirror assembly and then on the chip. I am sure, that we can get professional help with the optics stuff, as long it is visible light. Regards, Ludwig On 4/8/21, David Lanzend?rfer wrote: > Hi > So in the data sheet of the DLP2000 they say that UV light will reduce the > life span of the DMD chip. > However. Sam Zeloof is using a DMD display from an overhead projector > and it seems to be working ok. > Should I take the chance and take this 30 Euro chips from Mouser, although > the data sheet says, UV wouldn't be advised? > I mean, I still can replace the chip afterwards through a more expensive > UV chip, when the rest of the machine works... > > Cheers > -lev > > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > From hsank at posteo.de Sat Apr 10 13:03:10 2021 From: hsank at posteo.de (Hagen SANKOWSKI) Date: Sat, 10 Apr 2021 13:03:10 +0200 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-04-11 @ 18:00 UTC Message-ID: Hello List! This is our weekly announcement for the next Mumble Sessions on Sunday 2021-04-11 @ 18:00 UTC. Please join us as usual at our Mumble Server murmur.libresilicon.com at Port 64738, the Channel is IC. We like to follow-up our meeting minutes from mumble sessions before. Regards, Hagen. From leviathan at libresilicon.com Sat Apr 10 17:43:43 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Sat, 10 Apr 2021 16:43:43 +0100 Subject: [Libre-silicon-devel] GloveBox Message-ID: <3214531.vglGRFnh5k@harvey> Hi Attached you can find a screen capture of what I've got so far for the 3D design for the glove box. On the right I'm going to make some cut out and will have a small double door box, as an air lock. Cheers -lev -------------- next part -------------- A non-text attachment was scrubbed... Name: screen.png Type: image/png Size: 18855 bytes Desc: not available URL: From leviathan at libresilicon.com Sat Apr 10 17:45:49 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Sat, 10 Apr 2021 16:45:49 +0100 Subject: [Libre-silicon-devel] Lifespan & UV In-Reply-To: References: <1861763.LdSb0khDVW@harvey> <3504042.DotYG6TCvu@harvey> Message-ID: <1710900.p0O4n5aIe6@harvey> Hi Martin Turns out that 400nm is still within the tolerance range of the DMD display, and is a wave length short enough for commonly used resists to react with. I guess I'll use a 400 nm UV LED (visible part of UV). Cheers -lev On Thursday, April 8, 2021 2:08:35 PM WEST Martin Geisse wrote: > Hi David, > > I have to admit that using visible light was probably a stupid idea. There > seem to be some more photoresists that are somewhat sensitive to visible > blue/violet [1], but they seem hard to get. > > So back to the idea of using a chip socket so the DMD can be replaced when > UV breaks it: This will allow to learn not only about how well the DMD > takes UV, but also about the failure modes. For example, blurring the image > a bit is probably not as bad, and even faulty pixels are covered by typical > design rules (taking MOSIS SCMOS as an example). OTOH if the electronics of > the DMD get faulty, it's probably game over. Those are things the datasheet > probably won't tell you, so trying it the only way to find out. > > Another idea would be test patterns using visible light. If the DMD > degrades gradually, a test pattern would allow to find out if it is still > usable or not. By that, a degraded DMD is no longer a catastrophic event, > but rather is part of the expected lifetime of the DIY kit and allows to > factor the price of the DMD into the price of the service, mapped over the > number of dies produced with it. For example, if the DMD can shoot 100 > images before it breaks, and costs 50?, it's 0,50? per image or 2? per die > if you need 4 photolitho'd layers. > > (BTW, the datasheet only says that bright UV and simultaneous temperatures > > > 70?C are harmful, so that might mean that nothing bad will happen if you > > just don't stress the DMD too much) > > [1] https://www.lithoprotect.com/en/worth-knowing/ > > Greetings, > Martin > > > On Thu, Apr 8, 2021 at 2:04 PM David Lanzend?rfer < > > leviathan at libresilicon.com> wrote: > > Hi Martin > > There's a patent for a very easy to use resist which can be used with > > visible light, but I've got to do some digging on what suppliers produce > > it: > > https://patents.google.com/patent/US7354692B2/en > > Visible light resist would clearly be preferable, because then the DMD > > would need to be operated outside of the intended specs. > > > > Cheers > > -lev > > > > On Thursday, April 8, 2021 12:58:08 PM WEST Martin Geisse wrote: > > > Hi David, > > > > > > is there a need to use UV light, e.g. does the photoresist need UV to > > > react? Blue or white light would not only be more friendly to the DMD > > > > chip > > > > > but also require less precautions, be directly visible with a microscope > > > for alignment and checking (or at 50u, maybe even a good magnifying > > > > glass), > > > > > etc. > > > > > > At least at 50u the wavelength will be much smaller so sharpness or > > > diffraction isn't a concern. > > > > > > If you really need UV, I'd suggest using a socket so you can at least > > > replace the DMD chip when it breaks. 30-50? is okay-ish to try if it > > > survives "long enough" on average. > > > > > > Greetings, > > > Martin > > > > > > > > > On Thu, Apr 8, 2021 at 1:32 PM David Lanzend?rfer < > > > > > > leviathan at libresilicon.com> wrote: > > > > Hi > > > > So in the data sheet of the DLP2000 they say that UV light will reduce > > > > the > > > > > > life span of the DMD chip. > > > > However. Sam Zeloof is using a DMD display from an overhead projector > > > > and it seems to be working ok. > > > > Should I take the chance and take this 30 Euro chips from Mouser, > > > > although > > > > > > the data sheet says, UV wouldn't be advised? > > > > I mean, I still can replace the chip afterwards through a more > > > > expensive > > > > > > UV chip, when the rest of the machine works... > > > > > > > > Cheers > > > > -lev > > > > > > > > _______________________________________________ > > > > Libresilicon-developers mailing list > > > > Libresilicon-developers at list.libresilicon.com > > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From leviathan at libresilicon.com Sat Apr 10 22:07:07 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Sat, 10 Apr 2021 21:07:07 +0100 Subject: [Libre-silicon-devel] Stepper Message-ID: <3689919.Cz6yQSid21@harvey> Hi So for detecting the aligner markers I'll probably use the MLX90640ESF- BAA-000-SP[1] for detecting the alignment marker by shining through the waver with an IR LED. This resist[2] here can be exposed with a UV LED[3] up to 450nm wavelength, which is well within the tolerance range of the DLP2000[4] (on page 8). I'm right now working out the radial alignment and the loading mechanism, which is actually much harder than originally envisioned, because I kind of need a suction mechanism because I don't wanna scratch the surface or expose the wafer to too much mechanical stress. Cheers -lev [1] https://eu.mouser.com/ProductDetail/Melexis/MLX90640ESF-BAA-000-SP/? qs=y6ZabgHbY%252Bz1Luyoz5kAtA== [2] https://www.microresist.de/en/produkt/ma-p-1200g-series/ [3] https://protosupplies.com/product/led-3w-deep-blue-440-445nm-10-pack/ [4] https://www.ti.com/lit/ds/symlink/dlp2000.pdf From leviathan at libresilicon.com Sat Apr 10 23:33:23 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Sat, 10 Apr 2021 22:33:23 +0100 Subject: [Libre-silicon-devel] GloveBox Message-ID: <2147242.UDftdbSKDt@harvey> Hi I was thinking about using sheet metal for everything which doesn't need to be transparent (even cheaper than acrylic glas). For the airlock I was figuring I could do a cut out like in the attached screen and fold it, then either weld or screw an aluminum box made from folded sheet metal as well. What do you think? Cheers -lev -------------- next part -------------- A non-text attachment was scrubbed... Name: screeny.png Type: image/png Size: 6801 bytes Desc: not available URL: From martingeisse at googlemail.com Sun Apr 11 09:17:01 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Sun, 11 Apr 2021 09:17:01 +0200 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: <2147242.UDftdbSKDt@harvey> References: <2147242.UDftdbSKDt@harvey> Message-ID: Hi David, some ideas / questions: > I was thinking about using sheet metal for everything Pardon my ignorance, but how are you going to see what you are doing in there? Did you mean that one side is still acrylic? Front or top? > airlock If this is on the side wall, then it is probably hard to reach with your hands. On the other hand, the back wall (opposite of the gloves) is the most precious space you have and "wasting" it for the airlock is not good either... A quick idea would be to attach the airlock at the bottom, with the outer door facing towards you and the inner door being a "trap door" in the bottom of the box. > tools If everything happens inside the box, space is even more precious. You'll need storage for the materials and chemicals, illumination stage, hot plate, spin coater, furnace, ... A rotating shelf on the back side might be a solution for that. OTOH, an unsolved problem is be what the residual heat of the furnace is going to do to the acrylic box... > gloves Gloves always bring the danger of trapping hazardous chemicals *inside*, right next to your hands. You'll probably need a material that withstands *all* of those chemicals, otherwise you might have the piranha etch make the gloves porous and then HF leak through them... A simple warning not to spill anything over the gloves is probably not enough because these things just happen anyway. Greetings, Martin On Sat, Apr 10, 2021 at 11:33 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Hi > I was thinking about using sheet metal for everything which doesn't need > to be > transparent (even cheaper than acrylic glas). > For the airlock I was figuring I could do a cut out like in the attached > screen and fold it, then either weld or screw an aluminum box made from > folded > sheet metal as well. > > What do you think? > > Cheers > -lev_______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers -------------- next part -------------- An HTML attachment was scrubbed... URL: From leviathan at libresilicon.com Sun Apr 11 12:24:36 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Sun, 11 Apr 2021 11:24:36 +0100 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: References: <2147242.UDftdbSKDt@harvey> Message-ID: <13377106.01kcT4Pnnz@harvey> Hi Maybe you can join today 6pm UTC on our Mumble server murmur.libresilicon.com and we can discuss where to best place the airlock and how to build it the easiest and cheapest way? Cheers -lev On Sunday, April 11, 2021 8:17:01 AM WEST Martin Geisse wrote: > Hi David, > > some ideas / questions: > > I was thinking about using sheet metal for everything > > Pardon my ignorance, but how are you going to see what you are doing in > there? Did you mean that one side is still acrylic? Front or top? > > > airlock > > If this is on the side wall, then it is probably hard to reach with your > hands. On the other hand, the back wall (opposite of the gloves) is the > most precious space you have and "wasting" it for the airlock is not good > either... > > A quick idea would be to attach the airlock at the bottom, with the outer > door facing towards you and the inner door being a "trap door" in the > bottom of the box. > > > tools > > If everything happens inside the box, space is even more precious. You'll > need storage for the materials and chemicals, illumination stage, hot > plate, spin coater, furnace, ... A rotating shelf on the back side might be > a solution for that. > > OTOH, an unsolved problem is be what the residual heat of the furnace is > going to do to the acrylic box... > > > gloves > > Gloves always bring the danger of trapping hazardous chemicals *inside*, > right next to your hands. You'll probably need a material that withstands > *all* of those chemicals, otherwise you might have the piranha etch make > the gloves porous and then HF leak through them... A simple warning not to > spill anything over the gloves is probably not enough because these things > just happen anyway. > > Greetings, > Martin > > > > On Sat, Apr 10, 2021 at 11:33 PM David Lanzend?rfer < > > leviathan at libresilicon.com> wrote: > > Hi > > I was thinking about using sheet metal for everything which doesn't need > > to be > > transparent (even cheaper than acrylic glas). > > For the airlock I was figuring I could do a cut out like in the attached > > screen and fold it, then either weld or screw an aluminum box made from > > folded > > sheet metal as well. > > > > What do you think? > > > > Cheers > > -lev_______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers at list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From martingeisse at googlemail.com Sun Apr 11 13:16:54 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Sun, 11 Apr 2021 13:16:54 +0200 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: <13377106.01kcT4Pnnz@harvey> References: <2147242.UDftdbSKDt@harvey> <13377106.01kcT4Pnnz@harvey> Message-ID: Hi David, I'm afraid I won't be home in time for that session. I'll think about it some more, though. Do you have a rough list of the large things that have to be inside, e.g. does the furnace have to be inside or is there a way to keep it separate? Greetings, Martin On Sun, Apr 11, 2021 at 12:24 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Hi > Maybe you can join today 6pm UTC on our Mumble server > murmur.libresilicon.com > and we can discuss where to best place the airlock and how to build it the > easiest and cheapest way? > > Cheers > -lev > > On Sunday, April 11, 2021 8:17:01 AM WEST Martin Geisse wrote: > > Hi David, > > > > some ideas / questions: > > > I was thinking about using sheet metal for everything > > > > Pardon my ignorance, but how are you going to see what you are doing in > > there? Did you mean that one side is still acrylic? Front or top? > > > > > airlock > > > > If this is on the side wall, then it is probably hard to reach with your > > hands. On the other hand, the back wall (opposite of the gloves) is the > > most precious space you have and "wasting" it for the airlock is not good > > either... > > > > A quick idea would be to attach the airlock at the bottom, with the outer > > door facing towards you and the inner door being a "trap door" in the > > bottom of the box. > > > > > tools > > > > If everything happens inside the box, space is even more precious. You'll > > need storage for the materials and chemicals, illumination stage, hot > > plate, spin coater, furnace, ... A rotating shelf on the back side might > be > > a solution for that. > > > > OTOH, an unsolved problem is be what the residual heat of the furnace is > > going to do to the acrylic box... > > > > > gloves > > > > Gloves always bring the danger of trapping hazardous chemicals *inside*, > > right next to your hands. You'll probably need a material that withstands > > *all* of those chemicals, otherwise you might have the piranha etch make > > the gloves porous and then HF leak through them... A simple warning not > to > > spill anything over the gloves is probably not enough because these > things > > just happen anyway. > > > > Greetings, > > Martin > > > > > > > > On Sat, Apr 10, 2021 at 11:33 PM David Lanzend?rfer < > > > > leviathan at libresilicon.com> wrote: > > > Hi > > > I was thinking about using sheet metal for everything which doesn't > need > > > to be > > > transparent (even cheaper than acrylic glas). > > > For the airlock I was figuring I could do a cut out like in the > attached > > > screen and fold it, then either weld or screw an aluminum box made from > > > folded > > > sheet metal as well. > > > > > > What do you think? > > > > > > Cheers > > > -lev_______________________________________________ > > > Libresilicon-developers mailing list > > > Libresilicon-developers at list.libresilicon.com > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martingeisse at googlemail.com Mon Apr 12 11:49:52 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Mon, 12 Apr 2021 11:49:52 +0200 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: <13377106.01kcT4Pnnz@harvey> References: <2147242.UDftdbSKDt@harvey> <13377106.01kcT4Pnnz@harvey> Message-ID: Hi, so here's some more thoughts about the glove box: - furnace I found this mini furnace manufacturer: https://www.tabletopfurnace.com/ They are somewhat outside our price range, about $500, but otherwise they match quite well, e.g. https://www.tabletopfurnace.com/product/quikmelt-10/ That furnace is electrically powered (you probably shouldn't use a propane furnace indoors), it's tiny so less heat is wasted, and due to its size it should be possible to attach it to the back side of the glove box. I still think that having the furnace inside the box is a problem because the heat cannot escape well, but having it outside and connecting it through another opening in the box should be possible. - insulation You'll still probably have to thermically insulate the furnace from the glove box (even if the back wall is made of sheet metal and not acrylic). My first idea is to use calcium silicate boards, e.g. https://www.promat.com/en/industry/technologies/calcium-silicates/high-temperature-insulation/ These boards are used to insulate masonry heaters from walls and can take up to 1000?C -- the outside of the furnace is probably not as hot, so that should be enough. My guess is to use high-temperature mortar to glue the boards to the furnace (keeping the inside dust-free, it's a clean room after all) and something more flexible, e.g. high-temperature silicone, to glue the boards to the back side of the glove box. If both connections were rigid then it would break too easily, especially with thermal expansion. The alternative would be rock wool, but that stuff is nasty (at least if it's similar to glass wool). Calcium silicate is similar to gypsum in handling, just more expensive. - spin coater My first idea to make this cheap is an axle connected to a disk and mounted in such a way that the axle can spin but not tilt. You could then attach a handheld drill to the bottom of the axle to spin it.I still like the idea except that the disk has to be inside the glove box and the axle has to leave the box at the bottom, so keeping it dust-tight AND freely spinnable but not tiltable is the main challenge with that. Someone who is wiser in mechanics can probably do that easily. Greetings, Martin On Sun, Apr 11, 2021 at 12:24 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Hi > Maybe you can join today 6pm UTC on our Mumble server > murmur.libresilicon.com > and we can discuss where to best place the airlock and how to build it the > easiest and cheapest way? > > Cheers > -lev > > On Sunday, April 11, 2021 8:17:01 AM WEST Martin Geisse wrote: > > Hi David, > > > > some ideas / questions: > > > I was thinking about using sheet metal for everything > > > > Pardon my ignorance, but how are you going to see what you are doing in > > there? Did you mean that one side is still acrylic? Front or top? > > > > > airlock > > > > If this is on the side wall, then it is probably hard to reach with your > > hands. On the other hand, the back wall (opposite of the gloves) is the > > most precious space you have and "wasting" it for the airlock is not good > > either... > > > > A quick idea would be to attach the airlock at the bottom, with the outer > > door facing towards you and the inner door being a "trap door" in the > > bottom of the box. > > > > > tools > > > > If everything happens inside the box, space is even more precious. You'll > > need storage for the materials and chemicals, illumination stage, hot > > plate, spin coater, furnace, ... A rotating shelf on the back side might > be > > a solution for that. > > > > OTOH, an unsolved problem is be what the residual heat of the furnace is > > going to do to the acrylic box... > > > > > gloves > > > > Gloves always bring the danger of trapping hazardous chemicals *inside*, > > right next to your hands. You'll probably need a material that withstands > > *all* of those chemicals, otherwise you might have the piranha etch make > > the gloves porous and then HF leak through them... A simple warning not > to > > spill anything over the gloves is probably not enough because these > things > > just happen anyway. > > > > Greetings, > > Martin > > > > > > > > On Sat, Apr 10, 2021 at 11:33 PM David Lanzend?rfer < > > > > leviathan at libresilicon.com> wrote: > > > Hi > > > I was thinking about using sheet metal for everything which doesn't > need > > > to be > > > transparent (even cheaper than acrylic glas). > > > For the airlock I was figuring I could do a cut out like in the > attached > > > screen and fold it, then either weld or screw an aluminum box made from > > > folded > > > sheet metal as well. > > > > > > What do you think? > > > > > > Cheers > > > -lev_______________________________________________ > > > Libresilicon-developers mailing list > > > Libresilicon-developers at list.libresilicon.com > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From leviathan at libresilicon.com Mon Apr 12 16:27:52 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Mon, 12 Apr 2021 15:27:52 +0100 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: References: <2147242.UDftdbSKDt@harvey> <13377106.01kcT4Pnnz@harvey> Message-ID: <5825074.EPaJEz6dYE@harvey> Hi There's a problem... It's for vertical loading and the carbon will contaminate the circuit. I know those furnaces well, it's used in recycling Aluminum and for casting. I wanna make a "Liberator" (3D printed gun) into metal using one of those already for a while. However, those furnaces are unsuitable for chip making I'm afraid. Cheers -lev On Monday, April 12, 2021 10:49:52 AM WEST Martin Geisse wrote: > Hi, > > so here's some more thoughts about the glove box: > > - furnace > > I found this mini furnace manufacturer: https://www.tabletopfurnace.com/ > > They are somewhat outside our price range, about $500, but otherwise they > match quite well, e.g. https://www.tabletopfurnace.com/product/quikmelt-10/ > > That furnace is electrically powered (you probably shouldn't use a propane > furnace indoors), it's tiny so less heat is wasted, and due to its size it > should be possible to attach it to the back side of the glove box. I still > think that having the furnace inside the box is a problem because the heat > cannot escape well, but having it outside and connecting it through another > opening in the box should be possible. > > - insulation > > You'll still probably have to thermically insulate the furnace from the > glove box (even if the back wall is made of sheet metal and not acrylic). > My first idea is to use calcium silicate boards, e.g. > https://www.promat.com/en/industry/technologies/calcium-silicates/high-tempe > rature-insulation/ > > These boards are used to insulate masonry heaters from walls and can take > up to 1000?C -- the outside of the furnace is probably not as hot, so that > should be enough. My guess is to use high-temperature mortar to glue the > boards to the furnace (keeping the inside dust-free, it's a clean room > after all) and something more flexible, e.g. high-temperature silicone, to > glue the boards to the back side of the glove box. If both connections were > rigid then it would break too easily, especially with thermal expansion. > > The alternative would be rock wool, but that stuff is nasty (at least if > it's similar to glass wool). Calcium silicate is similar to gypsum in > handling, just more expensive. > > - spin coater > > My first idea to make this cheap is an axle connected to a disk and mounted > in such a way that the axle can spin but not tilt. You could then attach a > handheld drill to the bottom of the axle to spin it.I still like the idea > except that the disk has to be inside the glove box and the axle has to > leave the box at the bottom, so keeping it dust-tight AND freely spinnable > but not tiltable is the main challenge with that. Someone who is wiser in > mechanics can probably do that easily. > > > Greetings, > Martin > > > > > > On Sun, Apr 11, 2021 at 12:24 PM David Lanzend?rfer < > > leviathan at libresilicon.com> wrote: > > Hi > > Maybe you can join today 6pm UTC on our Mumble server > > murmur.libresilicon.com > > and we can discuss where to best place the airlock and how to build it the > > easiest and cheapest way? > > > > Cheers > > -lev > > > > On Sunday, April 11, 2021 8:17:01 AM WEST Martin Geisse wrote: > > > Hi David, > > > > > > some ideas / questions: > > > > I was thinking about using sheet metal for everything > > > > > > Pardon my ignorance, but how are you going to see what you are doing in > > > there? Did you mean that one side is still acrylic? Front or top? > > > > > > > airlock > > > > > > If this is on the side wall, then it is probably hard to reach with your > > > hands. On the other hand, the back wall (opposite of the gloves) is the > > > most precious space you have and "wasting" it for the airlock is not > > > good > > > either... > > > > > > A quick idea would be to attach the airlock at the bottom, with the > > > outer > > > door facing towards you and the inner door being a "trap door" in the > > > bottom of the box. > > > > > > > tools > > > > > > If everything happens inside the box, space is even more precious. > > > You'll > > > need storage for the materials and chemicals, illumination stage, hot > > > plate, spin coater, furnace, ... A rotating shelf on the back side might > > > > be > > > > > a solution for that. > > > > > > OTOH, an unsolved problem is be what the residual heat of the furnace is > > > going to do to the acrylic box... > > > > > > > gloves > > > > > > Gloves always bring the danger of trapping hazardous chemicals *inside*, > > > right next to your hands. You'll probably need a material that > > > withstands > > > *all* of those chemicals, otherwise you might have the piranha etch make > > > the gloves porous and then HF leak through them... A simple warning not > > > > to > > > > > spill anything over the gloves is probably not enough because these > > > > things > > > > > just happen anyway. > > > > > > Greetings, > > > Martin > > > > > > > > > > > > On Sat, Apr 10, 2021 at 11:33 PM David Lanzend?rfer < > > > > > > leviathan at libresilicon.com> wrote: > > > > Hi > > > > I was thinking about using sheet metal for everything which doesn't > > > > need > > > > > > to be > > > > transparent (even cheaper than acrylic glas). > > > > For the airlock I was figuring I could do a cut out like in the > > > > attached > > > > > > screen and fold it, then either weld or screw an aluminum box made > > > > from > > > > folded > > > > sheet metal as well. > > > > > > > > What do you think? > > > > > > > > Cheers > > > > -lev_______________________________________________ > > > > Libresilicon-developers mailing list > > > > Libresilicon-developers at list.libresilicon.com > > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From martingeisse at googlemail.com Mon Apr 12 22:50:46 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Mon, 12 Apr 2021 22:50:46 +0200 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: <5825074.EPaJEz6dYE@harvey> References: <2147242.UDftdbSKDt@harvey> <13377106.01kcT4Pnnz@harvey> <5825074.EPaJEz6dYE@harvey> Message-ID: Hi David, thanks for the hint about carbon, didn't know that. That the furnace is top-loading is something I just overlooked. However, the same company has front-loading furnaces and it seems that with the Quikmelt, only the crucible is made out of graphite, the furnace itself doesn't seem to have any. (To be more exact, the description of the Quikmelt says something about organic binder and I'm not sure if that leaks any carbon; the description of the Rapidfire doesn't say anything like that but the material looks similar). https://www.tabletopfurnace.com/product/rapidfire-pro-l/ https://www.tabletopfurnace.com/product/rapidfire-pro-lp/ The -LP variant has more sophisticated temperature control. There is another thing that came to my mind about the furnace though: Do they have to be airtight, or placed inside an airtight container, for the doping steps? IIRC doping has to happen under nitrogen or nitrogen/hydrogen atmosphere (or even vacuum) so it doesn't accidentally grow oxide on the silicon. Greetings, Martin On Mon, Apr 12, 2021 at 4:27 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Hi > There's a problem... It's for vertical loading and the carbon will > contaminate > the circuit. I know those furnaces well, it's used in recycling Aluminum > and > for casting. I wanna make a "Liberator" (3D printed gun) into metal > using one of those already for a while. > However, those furnaces are unsuitable for chip making I'm afraid. > > Cheers > -lev > > On Monday, April 12, 2021 10:49:52 AM WEST Martin Geisse wrote: > > Hi, > > > > so here's some more thoughts about the glove box: > > > > - furnace > > > > I found this mini furnace manufacturer: https://www.tabletopfurnace.com/ > > > > They are somewhat outside our price range, about $500, but otherwise they > > match quite well, e.g. > https://www.tabletopfurnace.com/product/quikmelt-10/ > > > > That furnace is electrically powered (you probably shouldn't use a > propane > > furnace indoors), it's tiny so less heat is wasted, and due to its size > it > > should be possible to attach it to the back side of the glove box. I > still > > think that having the furnace inside the box is a problem because the > heat > > cannot escape well, but having it outside and connecting it through > another > > opening in the box should be possible. > > > > - insulation > > > > You'll still probably have to thermically insulate the furnace from the > > glove box (even if the back wall is made of sheet metal and not acrylic). > > My first idea is to use calcium silicate boards, e.g. > > > https://www.promat.com/en/industry/technologies/calcium-silicates/high-tempe > > rature-insulation/ > > > > These boards are used to insulate masonry heaters from walls and can take > > up to 1000?C -- the outside of the furnace is probably not as hot, so > that > > should be enough. My guess is to use high-temperature mortar to glue the > > boards to the furnace (keeping the inside dust-free, it's a clean room > > after all) and something more flexible, e.g. high-temperature silicone, > to > > glue the boards to the back side of the glove box. If both connections > were > > rigid then it would break too easily, especially with thermal expansion. > > > > The alternative would be rock wool, but that stuff is nasty (at least if > > it's similar to glass wool). Calcium silicate is similar to gypsum in > > handling, just more expensive. > > > > - spin coater > > > > My first idea to make this cheap is an axle connected to a disk and > mounted > > in such a way that the axle can spin but not tilt. You could then attach > a > > handheld drill to the bottom of the axle to spin it.I still like the idea > > except that the disk has to be inside the glove box and the axle has to > > leave the box at the bottom, so keeping it dust-tight AND freely > spinnable > > but not tiltable is the main challenge with that. Someone who is wiser in > > mechanics can probably do that easily. > > > > > > Greetings, > > Martin > > > > > > > > > > > > On Sun, Apr 11, 2021 at 12:24 PM David Lanzend?rfer < > > > > leviathan at libresilicon.com> wrote: > > > Hi > > > Maybe you can join today 6pm UTC on our Mumble server > > > murmur.libresilicon.com > > > and we can discuss where to best place the airlock and how to build it > the > > > easiest and cheapest way? > > > > > > Cheers > > > -lev > > > > > > On Sunday, April 11, 2021 8:17:01 AM WEST Martin Geisse wrote: > > > > Hi David, > > > > > > > > some ideas / questions: > > > > > I was thinking about using sheet metal for everything > > > > > > > > Pardon my ignorance, but how are you going to see what you are doing > in > > > > there? Did you mean that one side is still acrylic? Front or top? > > > > > > > > > airlock > > > > > > > > If this is on the side wall, then it is probably hard to reach with > your > > > > hands. On the other hand, the back wall (opposite of the gloves) is > the > > > > most precious space you have and "wasting" it for the airlock is not > > > > good > > > > either... > > > > > > > > A quick idea would be to attach the airlock at the bottom, with the > > > > outer > > > > door facing towards you and the inner door being a "trap door" in the > > > > bottom of the box. > > > > > > > > > tools > > > > > > > > If everything happens inside the box, space is even more precious. > > > > You'll > > > > need storage for the materials and chemicals, illumination stage, hot > > > > plate, spin coater, furnace, ... A rotating shelf on the back side > might > > > > > > be > > > > > > > a solution for that. > > > > > > > > OTOH, an unsolved problem is be what the residual heat of the > furnace is > > > > going to do to the acrylic box... > > > > > > > > > gloves > > > > > > > > Gloves always bring the danger of trapping hazardous chemicals > *inside*, > > > > right next to your hands. You'll probably need a material that > > > > withstands > > > > *all* of those chemicals, otherwise you might have the piranha etch > make > > > > the gloves porous and then HF leak through them... A simple warning > not > > > > > > to > > > > > > > spill anything over the gloves is probably not enough because these > > > > > > things > > > > > > > just happen anyway. > > > > > > > > Greetings, > > > > Martin > > > > > > > > > > > > > > > > On Sat, Apr 10, 2021 at 11:33 PM David Lanzend?rfer < > > > > > > > > leviathan at libresilicon.com> wrote: > > > > > Hi > > > > > I was thinking about using sheet metal for everything which doesn't > > > > > > need > > > > > > > > to be > > > > > transparent (even cheaper than acrylic glas). > > > > > For the airlock I was figuring I could do a cut out like in the > > > > > > attached > > > > > > > > screen and fold it, then either weld or screw an aluminum box made > > > > > from > > > > > folded > > > > > sheet metal as well. > > > > > > > > > > What do you think? > > > > > > > > > > Cheers > > > > > -lev_______________________________________________ > > > > > Libresilicon-developers mailing list > > > > > Libresilicon-developers at list.libresilicon.com > > > > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From leviathan at libresilicon.com Thu Apr 15 18:05:14 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Thu, 15 Apr 2021 17:05:14 +0100 Subject: [Libre-silicon-devel] GloveBox In-Reply-To: References: <2147242.UDftdbSKDt@harvey> <5825074.EPaJEz6dYE@harvey> Message-ID: <2047205.qs3rDs5DNc@harvey> Hi So, although those look pretty affordable, I'm rather looking for something with which I can use a bit more complex recipes in the future, so that I might actually become able to run an entire CMOS process with silicide, grow nitride layers and build my own flash memory at some point. So I keep checking out eBay and I'm also trying to get an offer below 1000 USD from an Israeli firm, but it looks bad... :-/ Which however is no wonder, because their furnace is VERY advanced. Cheers -lev On Monday, April 12, 2021 9:50:46 PM WEST Martin Geisse wrote: > Hi David, > > thanks for the hint about carbon, didn't know that. That the furnace is > top-loading is something I just overlooked. However, the same company has > front-loading furnaces and it seems that with the Quikmelt, only the > crucible is made out of graphite, the furnace itself doesn't seem to have > any. (To be more exact, the description of the Quikmelt says something > about organic binder and I'm not sure if that leaks any carbon; the > description of the Rapidfire doesn't say anything like that but the > material looks similar). > > https://www.tabletopfurnace.com/product/rapidfire-pro-l/ > https://www.tabletopfurnace.com/product/rapidfire-pro-lp/ > > The -LP variant has more sophisticated temperature control. > > There is another thing that came to my mind about the furnace though: Do > they have to be airtight, or placed inside an airtight container, for the > doping steps? IIRC doping has to happen under nitrogen or nitrogen/hydrogen > atmosphere (or even vacuum) so it doesn't accidentally grow oxide on the > silicon. > > Greetings, > Martin > > > > On Mon, Apr 12, 2021 at 4:27 PM David Lanzend?rfer < > > leviathan at libresilicon.com> wrote: > > Hi > > There's a problem... It's for vertical loading and the carbon will > > contaminate > > the circuit. I know those furnaces well, it's used in recycling Aluminum > > and > > for casting. I wanna make a "Liberator" (3D printed gun) into metal > > using one of those already for a while. > > However, those furnaces are unsuitable for chip making I'm afraid. > > > > Cheers > > -lev > > > > On Monday, April 12, 2021 10:49:52 AM WEST Martin Geisse wrote: > > > Hi, > > > > > > so here's some more thoughts about the glove box: > > > > > > - furnace > > > > > > I found this mini furnace manufacturer: https://www.tabletopfurnace.com/ > > > > > > They are somewhat outside our price range, about $500, but otherwise > > > they > > > match quite well, e.g. > > > > https://www.tabletopfurnace.com/product/quikmelt-10/ > > > > > That furnace is electrically powered (you probably shouldn't use a > > > > propane > > > > > furnace indoors), it's tiny so less heat is wasted, and due to its size > > > > it > > > > > should be possible to attach it to the back side of the glove box. I > > > > still > > > > > think that having the furnace inside the box is a problem because the > > > > heat > > > > > cannot escape well, but having it outside and connecting it through > > > > another > > > > > opening in the box should be possible. > > > > > > - insulation > > > > > > You'll still probably have to thermically insulate the furnace from the > > > glove box (even if the back wall is made of sheet metal and not > > > acrylic). > > > My first idea is to use calcium silicate boards, e.g. > > > > https://www.promat.com/en/industry/technologies/calcium-silicates/high-tem > > pe> > > > rature-insulation/ > > > > > > These boards are used to insulate masonry heaters from walls and can > > > take > > > up to 1000?C -- the outside of the furnace is probably not as hot, so > > > > that > > > > > should be enough. My guess is to use high-temperature mortar to glue the > > > boards to the furnace (keeping the inside dust-free, it's a clean room > > > after all) and something more flexible, e.g. high-temperature silicone, > > > > to > > > > > glue the boards to the back side of the glove box. If both connections > > > > were > > > > > rigid then it would break too easily, especially with thermal expansion. > > > > > > The alternative would be rock wool, but that stuff is nasty (at least if > > > it's similar to glass wool). Calcium silicate is similar to gypsum in > > > handling, just more expensive. > > > > > > - spin coater > > > > > > My first idea to make this cheap is an axle connected to a disk and > > > > mounted > > > > > in such a way that the axle can spin but not tilt. You could then attach > > > > a > > > > > handheld drill to the bottom of the axle to spin it.I still like the > > > idea > > > except that the disk has to be inside the glove box and the axle has to > > > leave the box at the bottom, so keeping it dust-tight AND freely > > > > spinnable > > > > > but not tiltable is the main challenge with that. Someone who is wiser > > > in > > > mechanics can probably do that easily. > > > > > > > > > Greetings, > > > Martin > > > > > > > > > > > > > > > > > > On Sun, Apr 11, 2021 at 12:24 PM David Lanzend?rfer < > > > > > > leviathan at libresilicon.com> wrote: > > > > Hi > > > > Maybe you can join today 6pm UTC on our Mumble server > > > > murmur.libresilicon.com > > > > and we can discuss where to best place the airlock and how to build it > > > > the > > > > > > easiest and cheapest way? > > > > > > > > Cheers > > > > -lev > > > > > > > > On Sunday, April 11, 2021 8:17:01 AM WEST Martin Geisse wrote: > > > > > Hi David, > > > > > > > > > > some ideas / questions: > > > > > > I was thinking about using sheet metal for everything > > > > > > > > > > Pardon my ignorance, but how are you going to see what you are doing > > > > in > > > > > > > there? Did you mean that one side is still acrylic? Front or top? > > > > > > > > > > > airlock > > > > > > > > > > If this is on the side wall, then it is probably hard to reach with > > > > your > > > > > > > hands. On the other hand, the back wall (opposite of the gloves) is > > > > the > > > > > > > most precious space you have and "wasting" it for the airlock is not > > > > > good > > > > > either... > > > > > > > > > > A quick idea would be to attach the airlock at the bottom, with the > > > > > outer > > > > > door facing towards you and the inner door being a "trap door" in > > > > > the > > > > > bottom of the box. > > > > > > > > > > > tools > > > > > > > > > > If everything happens inside the box, space is even more precious. > > > > > You'll > > > > > need storage for the materials and chemicals, illumination stage, > > > > > hot > > > > > plate, spin coater, furnace, ... A rotating shelf on the back side > > > > might > > > > > > be > > > > > > > > > a solution for that. > > > > > > > > > > OTOH, an unsolved problem is be what the residual heat of the > > > > furnace is > > > > > > > going to do to the acrylic box... > > > > > > > > > > > gloves > > > > > > > > > > Gloves always bring the danger of trapping hazardous chemicals > > > > *inside*, > > > > > > > right next to your hands. You'll probably need a material that > > > > > withstands > > > > > *all* of those chemicals, otherwise you might have the piranha etch > > > > make > > > > > > > the gloves porous and then HF leak through them... A simple warning > > > > not > > > > > > to > > > > > > > > > spill anything over the gloves is probably not enough because these > > > > > > > > things > > > > > > > > > just happen anyway. > > > > > > > > > > Greetings, > > > > > Martin > > > > > > > > > > > > > > > > > > > > On Sat, Apr 10, 2021 at 11:33 PM David Lanzend?rfer < > > > > > > > > > > leviathan at libresilicon.com> wrote: > > > > > > Hi > > > > > > I was thinking about using sheet metal for everything which > > > > > > doesn't > > > > > > > > need > > > > > > > > > > to be > > > > > > transparent (even cheaper than acrylic glas). > > > > > > For the airlock I was figuring I could do a cut out like in the > > > > > > > > attached > > > > > > > > > > screen and fold it, then either weld or screw an aluminum box made > > > > > > from > > > > > > folded > > > > > > sheet metal as well. > > > > > > > > > > > > What do you think? > > > > > > > > > > > > Cheers > > > > > > -lev_______________________________________________ > > > > > > Libresilicon-developers mailing list > > > > > > Libresilicon-developers at list.libresilicon.com > > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From leviathan at libresilicon.com Thu Apr 15 18:11:34 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Thu, 15 Apr 2021 17:11:34 +0100 Subject: [Libre-silicon-devel] Stepper Message-ID: <6477341.5thujjIAPZ@harvey> Hi I guess I'll probably build something like this table here with linear ball bearings and a fixed gear shift which divides the steps of the stepper motor, so that I can have an appropriate stepping resolution for positioning. https://de.aliexpress.com/item/4001178550238.html I'm aware of the trouble with parallel alignment of two linear rail bars, but I'm afraid I'll have to deal with it, for at least one of the axis. I'll probably start ordering the parts as soon as I'm done moving into the new location next week and then I'll start extending the construction from there until I've got at least the x-y-positioning figured out. The loading mechanism also is pretty annoying... Besides having to build my own custom guided ball bearing for the angular alignment, I'll need at least 4 customely made metal parts... :-/ Cheers -lev From leviathan at libresilicon.com Thu Apr 15 18:15:41 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Thu, 15 Apr 2021 17:15:41 +0100 Subject: [Libre-silicon-devel] Stepper In-Reply-To: <6477341.5thujjIAPZ@harvey> References: <6477341.5thujjIAPZ@harvey> Message-ID: <3732790.ooN88RcT6h@harvey> Hi That's essentially it... Just with steppers... and a pneumatic thingy in the middle which comes up sucks at the waver, then the arm goes away and it goes back down to the surface... https://de.aliexpress.com/item/1005001335440793.html Cheers -lev On Thursday, April 15, 2021 5:11:34 PM WEST David Lanzend?rfer wrote: > Hi > I guess I'll probably build something like this table here with linear ball > bearings and a fixed gear shift which divides the steps of the stepper > motor, so that I can have an appropriate stepping resolution for > positioning. https://de.aliexpress.com/item/4001178550238.html > > I'm aware of the trouble with parallel alignment of two linear rail bars, > but I'm afraid I'll have to deal with it, for at least one of the axis. > > I'll probably start ordering the parts as soon as I'm done moving into the > new location next week and then I'll start extending the construction from > there until I've got at least the x-y-positioning figured out. > > The loading mechanism also is pretty annoying... Besides having to build > my own custom guided ball bearing for the angular alignment, I'll need at > least 4 customely made metal parts... :-/ > > Cheers > -lev > > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From leviathan at libresilicon.com Thu Apr 15 21:05:14 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Thu, 15 Apr 2021 20:05:14 +0100 Subject: [Libre-silicon-devel] Stepper resolution Message-ID: <7296479.tbjGQoqpg4@harvey> Hi So turns out there's another way to achieve higher resolutions (below 100nm), without having to use EUV light and low pressure. You can give your exposure unit a nice bath :-) https://en.wikipedia.org/wiki/Immersion_lithography What do you folks think? Worth considering putting on our TODO list for future stepper iterations? Cheers -lev From leviathan at libresilicon.com Fri Apr 16 13:33:35 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Fri, 16 Apr 2021 12:33:35 +0100 Subject: [Libre-silicon-devel] Stepper resolution In-Reply-To: References: <7296479.tbjGQoqpg4@harvey> Message-ID: <1763286.JGuLTu1AGB@harvey> Hi I'm aware of the complexity... That's I said "future iterations" :-) Cheers -lev On Friday, April 16, 2021 10:19:48 AM WEST ludwig jaffe wrote: > Hi all, > > this looks interesting, but beware complexity! > Polarization and other effects are to be taken care of. > > One idea for this would be to use oil immersion lenses > of microscopes and to try to reverse the beam pattern and > to step these. > > But we are hobbyists, and the only advantage we have is > access to knowledge but we also dont get all the details. > > So being part time scientists we should aim for low hanging fruit > first. > > Cheers, > > Ludwig > > On 4/15/21, David Lanzend?rfer wrote: > > Hi > > So turns out there's another way to achieve higher resolutions (below > > 100nm), > > without having to use EUV light and low pressure. > > You can give your exposure unit a nice bath :-) > > https://en.wikipedia.org/wiki/Immersion_lithography > > > > What do you folks think? Worth considering putting on our TODO list for > > future > > stepper iterations? > > > > Cheers > > -lev > > > > _______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers at list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From pavel at noa-labs.com Fri Apr 16 13:51:07 2021 From: pavel at noa-labs.com (Pavel Nikulin) Date: Fri, 16 Apr 2021 17:51:07 +0600 Subject: [Libre-silicon-devel] Stepper resolution In-Reply-To: <7296479.tbjGQoqpg4@harvey> References: <7296479.tbjGQoqpg4@harvey> Message-ID: Atm, the project is light years away from when air in between lens, and the die is a problem. Before you will run out of raw numeric aperture, things like temperature control, nanometric precision overlay etc, etc, etc will have to be solved first. Pavel Nikulin Software Engineer +7 702 851 0788 pavel at noa-labs.com On Fri, Apr 16, 2021 at 1:05 AM David Lanzend?rfer wrote: > > Hi > So turns out there's another way to achieve higher resolutions (below 100nm), > without having to use EUV light and low pressure. > You can give your exposure unit a nice bath :-) > https://en.wikipedia.org/wiki/Immersion_lithography > > What do you folks think? Worth considering putting on our TODO list for future > stepper iterations? > > Cheers > -lev > > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From leviathan at libresilicon.com Fri Apr 16 13:59:00 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Fri, 16 Apr 2021 12:59:00 +0100 Subject: [Libre-silicon-devel] Stepper resolution In-Reply-To: References: <7296479.tbjGQoqpg4@harvey> Message-ID: <1810308.qL6p1pemlY@harvey> Agreed On Friday, April 16, 2021 12:51:07 PM WEST Pavel Nikulin wrote: > Atm, the project is light years away from when air in between lens, > and the die is a problem. > > Before you will run out of raw numeric aperture, things like > temperature control, nanometric precision overlay etc, etc, etc will > have to be solved first. > > > Pavel Nikulin > Software Engineer > +7 702 851 0788 > pavel at noa-labs.com > > > > On Fri, Apr 16, 2021 at 1:05 AM David Lanzend?rfer > > wrote: > > Hi > > So turns out there's another way to achieve higher resolutions (below > > 100nm), without having to use EUV light and low pressure. > > You can give your exposure unit a nice bath :-) > > https://en.wikipedia.org/wiki/Immersion_lithography > > > > What do you folks think? Worth considering putting on our TODO list for > > future stepper iterations? > > > > Cheers > > -lev > > > > _______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers at list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From hsank at posteo.de Fri Apr 16 19:00:46 2021 From: hsank at posteo.de (Hagen SANKOWSKI) Date: Fri, 16 Apr 2021 17:00:46 +0000 Subject: [Libre-silicon-devel] Ouch! Message-ID: <618a1c22-b0d0-5fbd-dd3a-4e68d6b8bc8f@posteo.de> https://asia.nikkei.com/Business/Tech/Semiconductors/Chip-tools-become-latest-victim-of-global-semiconductor-crunch From hsank at posteo.de Fri Apr 16 19:05:59 2021 From: hsank at posteo.de (Hagen SANKOWSKI) Date: Fri, 16 Apr 2021 17:05:59 +0000 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-04-18 @ 18:00 UTC Message-ID: <699c326c-036d-8e23-7c7b-70280bdaa13c@posteo.de> Hello List! This is our weekly announcement for the next Mumble Sessions on Sunday 2021-04-18 @ 18:00 UTC. Please join us as usual at our Mumble Server murmur.libresilicon.com at Port 64738, the Channel is IC. We like to follow-up our topics from mumble sessions before. Regards, Hagen. From hsank at posteo.de Fri Apr 16 19:10:06 2021 From: hsank at posteo.de (Hagen SANKOWSKI) Date: Fri, 16 Apr 2021 17:10:06 +0000 Subject: [Libre-silicon-devel] Stepper resolution In-Reply-To: References: <7296479.tbjGQoqpg4@harvey> Message-ID: <7ee01751-d086-a5e6-cb51-1b09b4330eca@posteo.de> Nevertheless we should keep in mind this possibility :-) On 4/16/21 1:51 PM, Pavel Nikulin wrote: > Atm, the project is light years away from when air in between lens, > and the die is a problem. > > Before you will run out of raw numeric aperture, things like > temperature control, nanometric precision overlay etc, etc, etc will > have to be solved first. > > > Pavel Nikulin > Software Engineer > +7 702 851 0788 > pavel at noa-labs.com > > > > On Fri, Apr 16, 2021 at 1:05 AM David Lanzend?rfer > wrote: >> >> Hi >> So turns out there's another way to achieve higher resolutions (below 100nm), >> without having to use EUV light and low pressure. >> You can give your exposure unit a nice bath :-) >> https://en.wikipedia.org/wiki/Immersion_lithography >> >> What do you folks think? Worth considering putting on our TODO list for future >> stepper iterations? >> >> Cheers >> -lev >> >> _______________________________________________ >> Libresilicon-developers mailing list >> Libresilicon-developers at list.libresilicon.com >> https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > From hsank at posteo.de Sat Apr 24 14:00:22 2021 From: hsank at posteo.de (Hagen SANKOWSKI) Date: Sat, 24 Apr 2021 12:00:22 +0000 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-04-25 @ 18:00 UTC Message-ID: Hello List! This is our weekly announcement for the next Mumble Sessions on Sunday 2021-04-25 @ 18:00 UTC. Please join us as usual at our Mumble Server murmur.libresilicon.com at Port 64738, the Channel is IC. We like to follow-up our topics from mumble sessions before. Regards, Hagen. From hsank at posteo.de Sun Apr 25 16:03:20 2021 From: hsank at posteo.de (Hagen SANKOWSKI) Date: Sun, 25 Apr 2021 14:03:20 +0000 Subject: [Libre-silicon-devel] Particle Counter Message-ID: <9b7277c3-724c-cf25-2d8a-7d859a310a37@posteo.de> Hello List. A couple of Mumble Sessions before we talked about our Glove Box design once again.. Well, one action item was to figure out, how we can verify the clean room quality inside the Glove Box. And I remembered some nice handy-size Analyzer I saw already for this purpose (to check 'dirtyness' behind machines in the productive clean room behind machines or to check air flow in and outs). Fortunately, due to German Engineering Art in cheating with diesel engines (Volkswagen, Audi etc..) "fine dust" is a big topic nowadays. Okay, is was joke.. But, instruments to measure the fine dust in our daily environment, in cities along heavy used streets or so, are already available in bigger super markets like Kaufland here in Germany now. And this instruments offers 2 fine dust classes - one with 10 Micron and another with 2.5 Micron particle size. Of course, this is still a dimension away from particle sizes which matters for real clean room classes - regardless of which clean room class system (ISO 14644-1 or US Federal Standard 209 E) we are looking at. Anyway, IMHO this instruments are a great and quite reasonable priced step into particle measurements at all :-) The mentioned super market has currently an offer round about 200 Euros; on ebay.com similar instruments are available from 150 Euros upwards. Maybe we can even "update" the firmware on such a instrument for smaller particle sizes :-o Regards, Hagen. From martingeisse at googlemail.com Wed Apr 28 11:23:57 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Wed, 28 Apr 2021 11:23:57 +0200 Subject: [Libre-silicon-devel] coating / chemicals / litho / strategy Message-ID: Hi, - spin coating I finally tried to build a makeshift spin coater the way Sam Zeloof did, by mounting a plastic can on top of a CPU fan (actually a case fan from another device I had lying around). I can't say this is the way to go... the fan is way too weak to spin the can at a meaningful speed. It is also very hard to center the can exactly, so it wobbles a lot and that probably reduces the speed even more. Mounting a die without a container would allow the fan to spin faster, but would likely clog the fan with chemicals in no time. I'll next try my original idea, to mount the can to an axle that I'll stick into a power drill. One thing I did find out is that the coating liquid should be evenly applied before spinning. It will NOT spread to the whole surface by itself, but rather run to a single direction in a concentrated stream, probably due to surface tension. - chemicals I did find this resist which is meant for PCB etching, so I don't know yet whether it has some kind of "grain size" that limits the resolution. The datasheet explicitly states that it can take up to 40% hydrofluoric acid, though, and be used for glass etching (so I hope it will actually stick to glass). It is also liquid until soft-baking, so spin-coating should be possible. https://www.reichelt.de/fotopositiv-resist-positiv-20-200-ml-kontakt-235-p9493.html WRT hydrofluoric acid, there is something called "glass etching cream", the best-known brand being "Armour Etch". This contains fluorides, i.e. HF salts, is *somewhat* safer than HF itself (less fumes I think, but don't get it on your skin), and can be ordered by private individuals. The downside is that I could not find any information on whether it contains an abrasive. - photolithography Sam Zeloof used a modified DLP projector for his litho setup. He either used magic to do that or chose exactly the right projector. I took apart a used DLP and the UV filter is the only thing that could be taken out without destroying the projector. The color wheel, and even more so the optics, are buried under tons of other stuff, most of which is glued together. Also, the optics path itself is mostly glued. So I think David's plan of taking the DMD chip and building his own optics setup is a far better idea than modding a projector. To me as a layman in these things, stiching a larger image together from multiple images with a stepper sounds more logical than using multiple DMD chips. This XY table is cheap and has stepper motors that can position the table in increments of 5 microns. I have actually wondered if a first prototype should use a DMD at all, or just focus a single UV LED and "draw" by moving the XY table. https://www.amazon.de/Proxxon-27100-MICRO-Koordinatentisch-KT/dp/B000S81MHY - strategy I also thought a bit about who would be interested in making your own chips. High-volume production has far better, established processes, and low-volume production would use an FPGA or other off-the-shelf parts. Silicon testing before production isn't useful when the process is different. This leaves education and hobbyists. In other words, a free silicon process must be sustainable based solely on education and hobbyists, otherwise it won't stand a chance. There is another problem that goes in the same direction: a "democratized" chip making process should not rely on actors like INL, because there are too few of them -- less than 10 in the whole of Europe. Even if INL agrees to host the LibreSilicon process, a single decision by INL that chip making isn't interesting anymore can shut the whole thing down. I'm not particularly enthusiatic about the "glove box" idea either because I don't think it is practical, nor doable in a useful price range. The usual answer to the "expensive tools" problem is shared labs, usually as "fab labs", "makerspaces" or similar. I think this is a way in which chip making could actually work, especially if it works on dual-use tools that benefit a makerspace in other ways, like an XY table, microscope etc. I wanted to contact a local makerspace in my town, but unfortunately Germany just went into full Covid lockdown, so it's going to take a while until that. Greetings, Martin -------------- next part -------------- An HTML attachment was scrubbed... URL: From staf at fibraservi.eu Wed Apr 28 13:24:57 2021 From: staf at fibraservi.eu (Staf Verhaegen) Date: Wed, 28 Apr 2021 13:24:57 +0200 Subject: [Libre-silicon-devel] coating / chemicals / litho / strategy In-Reply-To: References: Message-ID: <9e5ef28a6ddc374bf36f1d608291aa3220b00f24.camel@fibraservi.eu> On wo, 2021-04-28 at 11:23 +0200, Martin Geisse wrote: > Hi, > > - spin coating > > I finally tried to build a makeshift spin coater the way Sam Zeloof > did, by mounting a plastic can on top of a CPU fan (actually a case > fan from another device I had lying around). I can't say this is the > way to go... the fan is way too weak to spin the can at a meaningful > speed. It is also very hard to center the can exactly, so it wobbles > a lot and that probably reduces the speed even more. Mounting a die > without a container would allow the fan to spin faster, but would > likely clog the fan with chemicals in no time. I'll next try my > original idea, to mount the can to an axle that I'll stick into a > power drill. > > One thing I did find out is that the coating liquid should be evenly > applied before spinning. It will NOT spread to the whole surface by > itself, but rather run to a single direction in a concentrated > stream, probably due to surface tension. If I remember correctly the spin coaters used in clean rooms first spin up the wafer and then dispense the liquid. You need to dispense liquid in middle of wafer as liquid will online move outwards. greets, Staf. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: signature.asc Type: application/pgp-signature Size: 488 bytes Desc: This is a digitally signed message part URL: From leviathan at libresilicon.com Wed Apr 28 17:06:21 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Wed, 28 Apr 2021 16:06:21 +0100 Subject: [Libre-silicon-devel] coating / chemicals / litho / strategy In-Reply-To: <9e5ef28a6ddc374bf36f1d608291aa3220b00f24.camel@fibraservi.eu> References: <9e5ef28a6ddc374bf36f1d608291aa3220b00f24.camel@fibraservi.eu> Message-ID: <2319423.kp56sYrUvu@harvey> Exactly. First you've gotta spin up the wafer, and then you've gotta dispense it kind of towards the center, but it's not so critical. I guess, you're experiencing problems because you didn't apply a primer first. https://www.3mdeutschland.de/3M/de_DE/unternehmen-de/produkte/~/3M-Silan-Glas-Primer-Transparent-1-L-Flasche/?N=5002385+3294237313&rt=rud Cheers -lev On Wednesday, April 28, 2021 12:24:57 PM WEST Staf Verhaegen wrote: > On wo, 2021-04-28 at 11:23 +0200, Martin Geisse wrote: > > Hi, > > > > - spin coating > > > > I finally tried to build a makeshift spin coater the way Sam Zeloof > > did, by mounting a plastic can on top of a CPU fan (actually a case > > fan from another device I had lying around). I can't say this is the > > way to go... the fan is way too weak to spin the can at a meaningful > > speed. It is also very hard to center the can exactly, so it wobbles > > a lot and that probably reduces the speed even more. Mounting a die > > without a container would allow the fan to spin faster, but would > > likely clog the fan with chemicals in no time. I'll next try my > > original idea, to mount the can to an axle that I'll stick into a > > power drill. > > > > One thing I did find out is that the coating liquid should be evenly > > applied before spinning. It will NOT spread to the whole surface by > > itself, but rather run to a single direction in a concentrated > > stream, probably due to surface tension. > > If I remember correctly the spin coaters used in clean rooms first spin > up the wafer and then dispense the liquid. You need to dispense liquid > in middle of wafer as liquid will online move outwards. > > greets, > Staf. From martingeisse at googlemail.com Wed Apr 28 19:36:11 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Wed, 28 Apr 2021 19:36:11 +0200 Subject: [Libre-silicon-devel] coating / chemicals / litho / strategy In-Reply-To: <2319423.kp56sYrUvu@harvey> References: <9e5ef28a6ddc374bf36f1d608291aa3220b00f24.camel@fibraservi.eu> <2319423.kp56sYrUvu@harvey> Message-ID: Hi, > If I remember correctly the spin coaters used in clean rooms first spin up the wafer and then dispense the liquid That did the job. I still think that the RPM is quite low because the fan is too weak, and I might later switch to the power drill to improve that, but applying the liquid only after the motor is spinning is definitely very important. > You need to dispense liquid in middle of wafer as liquid will online move outwards. Obviously :) > I guess, you're experiencing problems because you didn't apply a primer first. I only did a test, spinning oil onto a coin. I guess that the primer helps with wetting and/or sticking to the wafer surface, which wasn't (yet) a problem in my test. Anyway, good to know! Greetings, Martin On Wed, Apr 28, 2021 at 5:06 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Exactly. > First you've gotta spin up the wafer, and then you've gotta dispense it > kind of towards the center, but it's not so critical. > I guess, you're experiencing problems because you didn't apply a > primer first. > > https://www.3mdeutschland.de/3M/de_DE/unternehmen-de/produkte/~/3M-Silan-Glas-Primer-Transparent-1-L-Flasche/?N=5002385+3294237313&rt=rud > > Cheers > -lev > > On Wednesday, April 28, 2021 12:24:57 PM WEST Staf Verhaegen wrote: > > On wo, 2021-04-28 at 11:23 +0200, Martin Geisse wrote: > > > Hi, > > > > > > - spin coating > > > > > > I finally tried to build a makeshift spin coater the way Sam Zeloof > > > did, by mounting a plastic can on top of a CPU fan (actually a case > > > fan from another device I had lying around). I can't say this is the > > > way to go... the fan is way too weak to spin the can at a meaningful > > > speed. It is also very hard to center the can exactly, so it wobbles > > > a lot and that probably reduces the speed even more. Mounting a die > > > without a container would allow the fan to spin faster, but would > > > likely clog the fan with chemicals in no time. I'll next try my > > > original idea, to mount the can to an axle that I'll stick into a > > > power drill. > > > > > > One thing I did find out is that the coating liquid should be evenly > > > applied before spinning. It will NOT spread to the whole surface by > > > itself, but rather run to a single direction in a concentrated > > > stream, probably due to surface tension. > > > > If I remember correctly the spin coaters used in clean rooms first spin > > up the wafer and then dispense the liquid. You need to dispense liquid > > in middle of wafer as liquid will online move outwards. > > > > greets, > > Staf. > > > > _______________________________________________ > Libresilicon-developers mailing list > Libresilicon-developers at list.libresilicon.com > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > -------------- next part -------------- An HTML attachment was scrubbed... URL: From leviathan at libresilicon.com Fri Apr 30 14:52:54 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Fri, 30 Apr 2021 13:52:54 +0100 Subject: [Libre-silicon-devel] coating / chemicals / litho / strategy In-Reply-To: References: <2319423.kp56sYrUvu@harvey> Message-ID: <2283742.WTMS2gejt6@harvey> Hi So I've now set up the office here with tables and stuff and could reproduce your experiments. If we know which motor performs ok for building a cheap spin coater, I could actually build one a little bit more professionally, by ordering some of those motors from Aliexpress. We could then sell those coaters on eBay and finance LibreSilicon a bit with it. What do you think? Cheers -lev On Wednesday, April 28, 2021 6:36:11 PM WEST Martin Geisse wrote: > Hi, > > > If I remember correctly the spin coaters used in clean rooms first spin > > up the wafer and then dispense the liquid > > That did the job. I still think that the RPM is quite low because the fan > is too weak, and I might later switch to the power drill to improve that, > but applying the liquid only after the motor is spinning is definitely very > important. > > > You need to dispense liquid in middle of wafer as liquid will online move > > outwards. > > Obviously :) > > > I guess, you're experiencing problems because you didn't apply a primer > > first. > > I only did a test, spinning oil onto a coin. I guess that the primer helps > with wetting and/or sticking to the wafer surface, which wasn't (yet) a > problem in my test. Anyway, good to know! > > Greetings, > Martin > > > On Wed, Apr 28, 2021 at 5:06 PM David Lanzend?rfer < > > leviathan at libresilicon.com> wrote: > > Exactly. > > First you've gotta spin up the wafer, and then you've gotta dispense it > > kind of towards the center, but it's not so critical. > > I guess, you're experiencing problems because you didn't apply a > > primer first. > > > > https://www.3mdeutschland.de/3M/de_DE/unternehmen-de/produkte/~/3M-Silan-G > > las-Primer-Transparent-1-L-Flasche/?N=5002385+3294237313&rt=rud > > > > Cheers > > -lev > > > > On Wednesday, April 28, 2021 12:24:57 PM WEST Staf Verhaegen wrote: > > > On wo, 2021-04-28 at 11:23 +0200, Martin Geisse wrote: > > > > Hi, > > > > > > > > - spin coating > > > > > > > > I finally tried to build a makeshift spin coater the way Sam Zeloof > > > > did, by mounting a plastic can on top of a CPU fan (actually a case > > > > fan from another device I had lying around). I can't say this is the > > > > way to go... the fan is way too weak to spin the can at a meaningful > > > > speed. It is also very hard to center the can exactly, so it wobbles > > > > a lot and that probably reduces the speed even more. Mounting a die > > > > without a container would allow the fan to spin faster, but would > > > > likely clog the fan with chemicals in no time. I'll next try my > > > > original idea, to mount the can to an axle that I'll stick into a > > > > power drill. > > > > > > > > One thing I did find out is that the coating liquid should be evenly > > > > applied before spinning. It will NOT spread to the whole surface by > > > > itself, but rather run to a single direction in a concentrated > > > > stream, probably due to surface tension. > > > > > > If I remember correctly the spin coaters used in clean rooms first spin > > > up the wafer and then dispense the liquid. You need to dispense liquid > > > in middle of wafer as liquid will online move outwards. > > > > > > greets, > > > Staf. > > > > _______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers at list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers From hsank at posteo.de Fri Apr 30 14:56:11 2021 From: hsank at posteo.de (Hagen SANKOWSKI) Date: Fri, 30 Apr 2021 12:56:11 +0000 Subject: [Libre-silicon-devel] Announcement - Mumble session on Sunday 2021-05-02 @ 18:00 UTC Message-ID: <47004b70-7034-88c6-c7d8-3aee3d2a4fea@posteo.de> Hello List! This is our weekly announcement for the next Mumble Sessions on Sunday 2021-05-02 @ 18:00 UTC. Please join us as usual at our Mumble Server murmur.libresilicon.com at Port 64738, the Channel is IC. We like to follow-up our topics from mumble sessions before. Regards, Hagen. From martingeisse at googlemail.com Fri Apr 30 16:34:10 2021 From: martingeisse at googlemail.com (Martin Geisse) Date: Fri, 30 Apr 2021 16:34:10 +0200 Subject: [Libre-silicon-devel] coating / chemicals / litho / strategy In-Reply-To: <2283742.WTMS2gejt6@harvey> References: <2319423.kp56sYrUvu@harvey> <2283742.WTMS2gejt6@harvey> Message-ID: Hi, I'm not sure who would be interested in buying a cheap makeshift spin-coater since you cannot get anywhere with just that, and it's super-easy to make yourself. For somebody who wants to make their own chips, a much more interesting target would IMHO be a development board for the DMD chip, even if it is nothing more than power, capacitors and a pin header for everything else. The DMD chip has an LGA package, and another one I found at TI has a PGA package, so that's a bit tough to solder by hand. There are dev boards available, but they are basically a simple projector (e.g. including optics) [1] -- maybe it is possible to modify that instead of a full projector. [1] https://www.mouser.de/ProductDetail/Texas-Instruments/DLPDLCR2000EVM?qs=BZBei1rCqCAQetmBz0G1xQ== Anyway, I can't tell you the model of the fan/motor since it is one of the case fans of the DLP projector I took apart. I'm pretty sure that I can get a better PC case fan for 2? at the next supplier for computer parts. WRT financing, let me repeat that I'm willing to spend money on even the simplest chips, at this point even a single MOSFET, if they prove that the whole idea isn't vaporware. I'm pretty sure we can find more people that feel the same when the first actual device gets posted to Hackaday and similar sites. Also, a Patreon site like [2] may help, but again, only if you can actually present something working (that guy can't). I think Sam Zeloof neglected this too much and didn't give people an easy way to send him money, because I'm convinced he would have gotten a lot of it. [2] https://www.patreon.com/user?u=14363159 Greetings, Martin On Fri, Apr 30, 2021 at 2:52 PM David Lanzend?rfer < leviathan at libresilicon.com> wrote: > Hi > So I've now set up the office here with tables and stuff and could > reproduce > your experiments. > If we know which motor performs ok for building a cheap spin coater, I > could > actually build one a little bit more professionally, by ordering some of > those > motors from Aliexpress. > We could then sell those coaters on eBay and finance LibreSilicon > a bit with it. > > What do you think? > > Cheers > -lev > > On Wednesday, April 28, 2021 6:36:11 PM WEST Martin Geisse wrote: > > Hi, > > > > > If I remember correctly the spin coaters used in clean rooms first spin > > > > up the wafer and then dispense the liquid > > > > That did the job. I still think that the RPM is quite low because the fan > > is too weak, and I might later switch to the power drill to improve that, > > but applying the liquid only after the motor is spinning is definitely > very > > important. > > > > > You need to dispense liquid in middle of wafer as liquid will online > move > > > > outwards. > > > > Obviously :) > > > > > I guess, you're experiencing problems because you didn't apply a primer > > > > first. > > > > I only did a test, spinning oil onto a coin. I guess that the primer > helps > > with wetting and/or sticking to the wafer surface, which wasn't (yet) a > > problem in my test. Anyway, good to know! > > > > Greetings, > > Martin > > > > > > On Wed, Apr 28, 2021 at 5:06 PM David Lanzend?rfer < > > > > leviathan at libresilicon.com> wrote: > > > Exactly. > > > First you've gotta spin up the wafer, and then you've gotta dispense it > > > kind of towards the center, but it's not so critical. > > > I guess, you're experiencing problems because you didn't apply a > > > primer first. > > > > > > > https://www.3mdeutschland.de/3M/de_DE/unternehmen-de/produkte/~/3M-Silan-G > > > las-Primer-Transparent-1-L-Flasche/?N=5002385+3294237313&rt=rud > > > > > > Cheers > > > -lev > > > > > > On Wednesday, April 28, 2021 12:24:57 PM WEST Staf Verhaegen wrote: > > > > On wo, 2021-04-28 at 11:23 +0200, Martin Geisse wrote: > > > > > Hi, > > > > > > > > > > - spin coating > > > > > > > > > > I finally tried to build a makeshift spin coater the way Sam Zeloof > > > > > did, by mounting a plastic can on top of a CPU fan (actually a case > > > > > fan from another device I had lying around). I can't say this is > the > > > > > way to go... the fan is way too weak to spin the can at a > meaningful > > > > > speed. It is also very hard to center the can exactly, so it > wobbles > > > > > a lot and that probably reduces the speed even more. Mounting a die > > > > > without a container would allow the fan to spin faster, but would > > > > > likely clog the fan with chemicals in no time. I'll next try my > > > > > original idea, to mount the can to an axle that I'll stick into a > > > > > power drill. > > > > > > > > > > One thing I did find out is that the coating liquid should be > evenly > > > > > applied before spinning. It will NOT spread to the whole surface by > > > > > itself, but rather run to a single direction in a concentrated > > > > > stream, probably due to surface tension. > > > > > > > > If I remember correctly the spin coaters used in clean rooms first > spin > > > > up the wafer and then dispense the liquid. You need to dispense > liquid > > > > in middle of wafer as liquid will online move outwards. > > > > > > > > greets, > > > > Staf. > > > > > > _______________________________________________ > > > Libresilicon-developers mailing list > > > Libresilicon-developers at list.libresilicon.com > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From leviathan at libresilicon.com Fri Apr 30 18:08:02 2021 From: leviathan at libresilicon.com (David =?ISO-8859-1?Q?Lanzend=F6rfer?=) Date: Fri, 30 Apr 2021 17:08:02 +0100 Subject: [Libre-silicon-devel] coating / chemicals / litho / strategy In-Reply-To: References: <2283742.WTMS2gejt6@harvey> Message-ID: <7466862.mENeaHPDtb@harvey> Hi I think this one is more suitable: https://eu.mouser.com/ProductDetail/Texas-Instruments/DLP2000AFQC? qs=T3oQrply3y%252B2%252BSUG%252B1A5CA%3D%3D The board is connected through an FQC 42 connector socket, which I'm right now unable to find online. I guess I've gotta do some more digging on Alibaba and so on, in order to get my hands on one of those. Cheers -lev On Friday, April 30, 2021 3:34:10 PM WEST Martin Geisse wrote: > Hi, > > I'm not sure who would be interested in buying a cheap makeshift > spin-coater since you cannot get anywhere with just that, and it's > super-easy to make yourself. For somebody who wants to make their own > chips, a much more interesting target would IMHO be a development board for > the DMD chip, even if it is nothing more than power, capacitors and a pin > header for everything else. The DMD chip has an LGA package, and another > one I found at TI has a PGA package, so that's a bit tough to solder by > hand. There are dev boards available, but they are basically a simple > projector (e.g. including optics) [1] -- maybe it is possible to modify > that instead of a full projector. > > [1] > https://www.mouser.de/ProductDetail/Texas-Instruments/DLPDLCR2000EVM?qs=BZBe > i1rCqCAQetmBz0G1xQ== > > Anyway, I can't tell you the model of the fan/motor since it is one of the > case fans of the DLP projector I took apart. I'm pretty sure that I can get > a better PC case fan for 2? at the next supplier for computer parts. > > WRT financing, let me repeat that I'm willing to spend money on even the > simplest chips, at this point even a single MOSFET, if they prove that the > whole idea isn't vaporware. I'm pretty sure we can find more people that > feel the same when the first actual device gets posted to Hackaday and > similar sites. Also, a Patreon site like [2] may help, but again, only if > you can actually present something working (that guy can't). I think Sam > Zeloof neglected this too much and didn't give people an easy way to send > him money, because I'm convinced he would have gotten a lot of it. > > [2] https://www.patreon.com/user?u=14363159 > > Greetings, > Martin > > > > On Fri, Apr 30, 2021 at 2:52 PM David Lanzend?rfer < > > leviathan at libresilicon.com> wrote: > > Hi > > So I've now set up the office here with tables and stuff and could > > reproduce > > your experiments. > > If we know which motor performs ok for building a cheap spin coater, I > > could > > actually build one a little bit more professionally, by ordering some of > > those > > motors from Aliexpress. > > We could then sell those coaters on eBay and finance LibreSilicon > > a bit with it. > > > > What do you think? > > > > Cheers > > -lev > > > > On Wednesday, April 28, 2021 6:36:11 PM WEST Martin Geisse wrote: > > > Hi, > > > > > > > If I remember correctly the spin coaters used in clean rooms first > > > > spin > > > > > > up the wafer and then dispense the liquid > > > > > > That did the job. I still think that the RPM is quite low because the > > > fan > > > is too weak, and I might later switch to the power drill to improve > > > that, > > > but applying the liquid only after the motor is spinning is definitely > > > > very > > > > > important. > > > > > > > You need to dispense liquid in middle of wafer as liquid will online > > > > move > > > > > outwards. > > > > > > Obviously :) > > > > > > > I guess, you're experiencing problems because you didn't apply a > > > > primer > > > > > > first. > > > > > > I only did a test, spinning oil onto a coin. I guess that the primer > > > > helps > > > > > with wetting and/or sticking to the wafer surface, which wasn't (yet) a > > > problem in my test. Anyway, good to know! > > > > > > Greetings, > > > Martin > > > > > > > > > On Wed, Apr 28, 2021 at 5:06 PM David Lanzend?rfer < > > > > > > leviathan at libresilicon.com> wrote: > > > > Exactly. > > > > First you've gotta spin up the wafer, and then you've gotta dispense > > > > it > > > > kind of towards the center, but it's not so critical. > > > > I guess, you're experiencing problems because you didn't apply a > > > > primer first. > > > > https://www.3mdeutschland.de/3M/de_DE/unternehmen-de/produkte/~/3M-Silan-G > > > > > > las-Primer-Transparent-1-L-Flasche/?N=5002385+3294237313&rt=rud > > > > > > > > Cheers > > > > -lev > > > > > > > > On Wednesday, April 28, 2021 12:24:57 PM WEST Staf Verhaegen wrote: > > > > > On wo, 2021-04-28 at 11:23 +0200, Martin Geisse wrote: > > > > > > Hi, > > > > > > > > > > > > - spin coating > > > > > > > > > > > > I finally tried to build a makeshift spin coater the way Sam > > > > > > Zeloof > > > > > > did, by mounting a plastic can on top of a CPU fan (actually a > > > > > > case > > > > > > fan from another device I had lying around). I can't say this is > > > > the > > > > > > > > way to go... the fan is way too weak to spin the can at a > > > > meaningful > > > > > > > > speed. It is also very hard to center the can exactly, so it > > > > wobbles > > > > > > > > a lot and that probably reduces the speed even more. Mounting a > > > > > > die > > > > > > without a container would allow the fan to spin faster, but would > > > > > > likely clog the fan with chemicals in no time. I'll next try my > > > > > > original idea, to mount the can to an axle that I'll stick into a > > > > > > power drill. > > > > > > > > > > > > One thing I did find out is that the coating liquid should be > > > > evenly > > > > > > > > applied before spinning. It will NOT spread to the whole surface > > > > > > by > > > > > > itself, but rather run to a single direction in a concentrated > > > > > > stream, probably due to surface tension. > > > > > > > > > > If I remember correctly the spin coaters used in clean rooms first > > > > spin > > > > > > > up the wafer and then dispense the liquid. You need to dispense > > > > liquid > > > > > > > in middle of wafer as liquid will online move outwards. > > > > > > > > > > greets, > > > > > Staf. > > > > > > > > _______________________________________________ > > > > Libresilicon-developers mailing list > > > > Libresilicon-developers at list.libresilicon.com > > > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers