[Libre-silicon-devel] Maskless lithography

David Lanzendörfer leviathan at libresilicon.com
Mon Aug 2 04:57:46 CEST 2021

Hi all
I just woke up from bed again with the idea to use use laser triangulation for 
the distance measurement, since there's an inexpensive solution already for 
The internal ADC has a resolution of 16 bits, which should be sufficient to 
resolve the small distance a table for a 2 inch wafer has to travel.


On Sunday, August 1, 2021 2:46:34 PM WEST David Lanzendörfer wrote:
> Howdy
> So I came across those two components which can solve our positioning
> problem with the wafer:
> Those LEDs produce a light within the spectrum we need in order to shine
> through silicon (1000nm ~ 1400nm):
> https://tech-led.com/en/product/ir-nir-leds/
> The OV5647 is sensible up to at least 1000 nm and is quite affordable:
> https://cdn.sparkfun.com/datasheets/Dev/RaspberryPi/ov5647_full.pdf
> There are OV5647 imaging modules available for Raspberry Pi.
> I'll try to contact Marubemi directly and ask them for a quotation on their
> NIR/IR LEDs in the wavelength range we require and while I'm on it, I'll
> also check with them for a potentially more suitable CMOS sensor, then I'll
> compare the prices.
> As I've discussed with Dilek, the goal is to produce an affordable stepper
> suitable for hobbyists and small labs with limited budget.
> Cheers
> David

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