[Libre-silicon-devel] Maskless lithography

Dilek Isik Akcakaya trdilek at protonmail.com
Mon Aug 2 05:58:32 CEST 2021


Looks good David,

I started to create a road map to be discussed.

Dilek

-------- Original Message --------
On Aug 1, 2021, 7:57 PM, David Lanzendörfer wrote:

> Hi all
> I just woke up from bed again with the idea to use use laser triangulation for
> the distance measurement, since there's an inexpensive solution already for
> Arduino:
> https://rohling-de.blogspot.com/2017/04/shooting-laser-to-measure-distance.html
> https://www.st.com/resource/en/datasheet/vl6180x.pdf
> The internal ADC has a resolution of 16 bits, which should be sufficient to
> resolve the small distance a table for a 2 inch wafer has to travel.
>
> Cheers
> David
>
> On Sunday, August 1, 2021 2:46:34 PM WEST David Lanzendörfer wrote:
>> Howdy
>> So I came across those two components which can solve our positioning
>> problem with the wafer:
>>
>> Those LEDs produce a light within the spectrum we need in order to shine
>> through silicon (1000nm ~ 1400nm):
>> https://tech-led.com/en/product/ir-nir-leds/
>>
>> The OV5647 is sensible up to at least 1000 nm and is quite affordable:
>> https://cdn.sparkfun.com/datasheets/Dev/RaspberryPi/ov5647_full.pdf
>>
>> There are OV5647 imaging modules available for Raspberry Pi.
>> I'll try to contact Marubemi directly and ask them for a quotation on their
>> NIR/IR LEDs in the wavelength range we require and while I'm on it, I'll
>> also check with them for a potentially more suitable CMOS sensor, then I'll
>> compare the prices.
>> As I've discussed with Dilek, the goal is to produce an affordable stepper
>> suitable for hobbyists and small labs with limited budget.
>>
>> Cheers
>> David
>
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