[Libre-silicon-devel] sam zeloof home-made IC

[Dilek Isik Akcakaya]

Lets build a plasma etch system on the side then :)

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‐‐‐‐‐‐‐ Original Message ‐‐‐‐‐‐‐

Ferenc Éger <eegerferenc at gmail.com> 14 Ağustos 2021 Cumartesi saat 08:31 tarihinde yazdı:

> Hello Everyone,
>
> As for poly-Si etching our never-ending problem came across again:
>
> http://sam.zeloof.xyz/second-ic/
>
> https://eur-lex.europa.eu/legal-content/EN/TXT/?uri=CELEX:32019R1148
>
> He is probably not an European guy... And Europe aims to be on the map
>
> in terms of scientific progress... Never mind, we need no amateurs. Just
>
> spill a ton of public money onto our for-profit firms, they will solve
>
> everything in the right way. < / rant >
>
> The problem is nitric acid, that is visible outright. The n-dopant is
>
> also likely no-go (I did not find explicitly, but knowing how the
>
> legislators think, they may crap their pants on the word "phosphorus
>
> compound"). Any idea on solving this?
>
> Regards,
>
> Ferenc
>
> On 14/08/2021 14:13, David Lanzendörfer wrote:
>
> > Hi
> >
> > Yes. That's what I'm planning to do as well.
> >
> > The idea just was to design a bit more compact stepper, which can also be
> >
> > scaled up and sold for professional industrial environments, considering that
> >
> > the furnace costs 3200 USD and I've got to get the cash back in :-)
> >
> > Cheers,
> >
> > lev
> >
> > On Saturday, August 14, 2021 9:44:11 AM WEST Luke Kenneth Casson Leighton
> >
> > wrote:
> >
> > > https://www.youtube.com/watch?v=IS5ycm7VfXg
>
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