15 Apr
2021
15 Apr
'21
8:05 p.m.
Hi So turns out there's another way to achieve higher resolutions (below 100nm), without having to use EUV light and low pressure. You can give your exposure unit a nice bath :-) https://en.wikipedia.org/wiki/Immersion_lithography
What do you folks think? Worth considering putting on our TODO list for future stepper iterations?
Cheers -lev