There are a number of microled startups that are still labs scale. Growing an AlInGaN instead of GaN + MQW might be a challenge, or it might be not. The cost of custom run will from them will be interesting to know.
On Sun, Feb 23, 2020 at 8:25 PM David Lanzendörfer leviathan@libresilicon.com wrote:
Hi I like the idea. Some researchers apparently have already tried it out and it's feasible: https://aip.scitation.org/doi/abs/10.1063/1.1942636?ver=pdfcov&journalCo...
If a UV microLED matrix is less expensive than a DMD device, I certainly will go for it!
Thanks so much for the tip!
Do you have any suggestions on components suitable for that task?
Cheers -lev
On Monday, 24 February 2020 1:18:52 AM HKT Pavel Nikulin wrote:
Few ideas from me,
If you are going to stick with 360nm light for now, regular fused silica should not absorbing it that much. DUV litho needs 200w+ light sources because their optics is way more massive and more complex.
Have you thought of making something like a microled matrix? Getting 50w from it onto the wafer with liquid cooling, and simple optics should be real.
On Sun, Feb 23, 2020 at 8:06 PM Staf Verhaegen staf@fibraservi.eu wrote:
David Lanzendörfer schreef op ma 24-02-2020 om 00:42 [+0800]:
Hi
I'm apparently not the first one with the idea to use a DMD chip and an UV
light source for exposure:
https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-the -illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785> <https://www.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-th e-illumination-is-in-the-UV-spectrum-then-it-must_fig4_50395785>https://w ww.researchgate.net/figure/Layout-for-UV-based-DMD-system-If-the-illumina tion-is-in-the-UV-spectrum-then-it-must_fig4_50395785> Also Sam Zeloof has made his own chip with a DLP projector: http://sam.zeloof.xyz/maskless-photolithography/
greets, Staf.
Libresilicon-developers mailing list Libresilicon-developers@list.libresilicon.com https://list.libresilicon.com/mailman/listinfo/libresilicon-developers