8 Apr
2018
8 Apr
'18
2:47 p.m.
David Lanzendörfer schreef op zo 08-04-2018 om 22:28 [+0800]:
Hi Here is the ICO white paper we've discussed in the Mumble conference. Glad for feedback: https://docs.google.com/document/d/1XdLKafFeYxJJ69Lj8CvbAB36MNBcKUnrF3OQehWt...
Only had time to quickly browse through the document. I am surprised by the use of e-beam for prototyping. Did you look at the possible throughput you can get in that way ? With normal litho processing throughput is given in wafers per hour; for e-beam it is in hours per wafer. And this for each litho step.
greets, Staf.