Hi I'm aware of the complexity... That's I said "future iterations" :-)

Cheers -lev

On Friday, April 16, 2021 10:19:48 AM WEST ludwig jaffe wrote:

Hi all,

this looks interesting, but beware complexity! Polarization and other effects are to be taken care of.

One idea for this would be to use oil immersion lenses of microscopes and to try to reverse the beam pattern and to step these.

But we are hobbyists, and the only advantage we have is access to knowledge but we also dont get all the details.

So being part time scientists we should aim for low hanging fruit first.

Cheers,

Ludwig

On 4/15/21, David Lanzendörfer leviathan@libresilicon.com wrote:

...

Hi So turns out there's another way to achieve higher resolutions (below 100nm), without having to use EUV light and low pressure. You can give your exposure unit a nice bath :-) https://en.wikipedia.org/wiki/Immersion_lithography

What do you folks think? Worth considering putting on our TODO list for future stepper iterations?

Cheers -lev

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