3 Aug
2019
3 Aug
'19
5:22 a.m.
I just had an idea on my own BTW What about making deep oxide holes with this mask before sputtering metal1? Since between the metal layers we will anyway deposit nitride now as CMP stop we will have dielectrics for free essentially. So when making a big hole, we basically have deep caps between metal1 and metal2.
Cheers -lev
On Saturday, 3 August 2019 1:18:03 PM HKT David Lanzendörfer wrote:
Also, we've still got ONE dark field square left on one of the masks. -> Ideas for an additional feature needing a dark field mask?