(Now send to the list.) R. Timothy Edwards schreef op di 06-03-2018 om 16:48 [-0500]:
Hello Staf,
Could you summarize again what the problem is with poly gate? In the industry polysilicon has been the gate for all technologies I know from 1um up to at least 65nm.
What is commonly drawn as a poly gate is actually a "salicide", or poly coated with a thin layer of metal. This is what David is referring to. The difference between a poly salicide and plain polysilicon is a few ohms per square vs. a hundred ohms per square.
AFAIK, David is talking about aluminum gates. Silicidation or salidication is indeed a step done after poly formation to decrease sheet resistance of the poly. AFAIR also the diffusion regions are silicided but I think you need spacers then.
greets, Staf.