16 May
2019
16 May
'19
1:20 p.m.
Hi all So today I finished the nitride spacers, but because the dry etcher had problems again, it took me until 18.30h, until I finally was done and left the lab. Tomorrow I try to pull another stunt like this and get the silicide formation and LTO done. Maybe I even can manage to etch the wires, but it's many steps left, and I'm not sure I get it all done tomorrow.
Just a little update.
Cheers -lev