On Fri, Nov 20, 2020 at 2:11 PM ludwig jaffe ludwig.jaffe@gmail.com wrote:
- Effect of incoherent illumination on projection optics
I want to note that I-line mercury lamps were incoherent, and worked just fine before the industry switched to excimer lasers.
I have doubts if effect on quality at such power levels, and resolutions is a thing.
A 1µm process should be very viable for things like smart interposers, or other backend business. I'd say it should have an even higher bearing on things like WLCSP because you eliminate the mask shop from the loop every time you need to make a package modification, which can go up to 100+ for most popular chips.