Hello. On 1/14/20 11:08 AM, David Lanzendörfer wrote:
I guess that is both a very ambitious but at the same time very tempting project. Looking forward to seeing self-made litho steppers pop up in hackspaces ;D Exactly. Yes.
:-)
We can use a DMD[1] which already can go down to 500nm, as I've seen recently[2], assuming, we get the lens system right.
A issue I see here is the pattern structure of DMDs. Between all the small mirrors are always even smaller gaps. If we like to draw a bar, eg. poly or whatever (ASCII-Art) ------------------------- ----- ^ | v ------------------------- ----- the mirrors are with a gap instead +-------+ +-------+ ----- | mirror| |mirror | ^ | | gap | | | | | | | v +-------+ +-------+ ----- |<----->| ??? This means that it becomes difficult to "stitch" two mirrors gap-less. For human eyes it does not matter, the eyes does not see the pixel / pattern structure. But I guess, the photo resist will see 'em - so we have to tricked them out somehow. Can we use here diffraction? Or we already need double-pattering here? Regards, Hagen. -- support LibreSilicon to get back into the Clean Room https://www.gofundme.com/f/libresilicon-cleanroom-rent