Hi all So the wafer is now in the furnace, depositing LTO. Unfortunately it will only be done around 5pm where I can't enter the lab anymore :-( On Monday, when I get it back, I will etch the oxide holes and sputter the nickel first thing in the morning. Those damn holidays really did cost me a day. If the lab would have been open on Monday, I would be done now... Anyway
Cheers -lev
Hi all So today I finished the nitride spacers, but because the dry etcher had problems again, it took me until 18.30h, until I finally was done and left the lab. Tomorrow I try to pull another stunt like this and get the silicide formation and LTO done. Maybe I even can manage to etch the wires, but it's many steps left, and I'm not sure I get it all done tomorrow.
Just a little update.
Cheers -lev