Hello,
Well, being cost-effective and reliable I'd suggest to use components similar to CD or DVD players.
Wait a moment. CD/DVD burners are using heat and lasers to burn holes into flat wafers in a rather high precision way. Isn't that something we could use instead of photo-lithography+etching? It's just a hole at a time instead of a whole stepped pattern (or even a whole wafer), and we might have some challenge to get the laser to produce the patterns that we need, but wouldn't that be usable somehow? Bluray writers should be able to produce 130nm x 150nm holes
Best regards, Philipp Gühring