Hi So for detecting the aligner markers I'll probably use the MLX90640ESF- BAA-000-SP[1] for detecting the alignment marker by shining through the waver with an IR LED. This resist[2] here can be exposed with a UV LED[3] up to 450nm wavelength, which is well within the tolerance range of the DLP2000[4] (on page 8). I'm right now working out the radial alignment and the loading mechanism, which is actually much harder than originally envisioned, because I kind of need a suction mechanism because I don't wanna scratch the surface or expose the wafer to too much mechanical stress.

Cheers -lev

[1] https://eu.mouser.com/ProductDetail/Melexis/MLX90640ESF-BAA-000-SP/? qs=y6ZabgHbY%252Bz1Luyoz5kAtA== [2] https://www.microresist.de/en/produkt/ma-p-1200g-series/ [3] https://protosupplies.com/product/led-3w-deep-blue-440-445nm-10-pack/ [4] https://www.ti.com/lit/ds/symlink/dlp2000.pdf