Hi Hagen The analyzer in the lab is a the Keysight b1500a (Agilent). The probes are being placed manually by hand using a microscope. The probes are "4 Micropositioners in S-926 series" with a tip diameter of 4 microns. All infos here: http://www.nff.ust.hk/en/equipment-and-process/equipment-list/metrology.html Since the b1500a is an analyzer it can do basically everything we want :-) Cheers David