Re: [Libre-silicon-devel] Batch loading... robot arms??
Hello,
Well, being cost-effective and reliable I'd suggest to use components similar to CD or DVD players.
Wait a moment. CD/DVD burners are using heat and lasers to burn holes into flat wafers in a rather high precision way. Isn't that something we could use instead of photo-lithography+etching? It's just a hole at a time instead of a whole stepped pattern (or even a whole wafer), and we might have some challenge to get the laser to produce the patterns that we need, but wouldn't that be usable somehow? Bluray writers should be able to produce 130nm x 150nm holes Best regards, Philipp Gühring
On 2/1/22 4:25 PM, Philipp Gühring wrote:
Hello,
Well, being cost-effective and reliable I'd suggest to use components similar to CD or DVD players.
Wait a moment. CD/DVD burners are using heat and lasers to burn holes into flat wafers in a rather high precision way. Isn't that something we could use instead of photo-lithography+etching? It's just a hole at a time instead of a whole stepped pattern (or even a whole wafer), and we might have some challenge to get the laser to produce the patterns that we need, but wouldn't that be usable somehow? Bluray writers should be able to produce 130nm x 150nm holes
I bet, we can cannibalise cheap laser-diodes from Blu-ray devices. I do not really like this DRM-stuff anyway :-) BTW, Blu-ray devices use 405 nm laser-diodes [0] - which is *precisely* the H-line on ultraviolet photolithography [1]. The H-line is still visible for the human eye and known as "black light". Are we crazy, thinking about a laser beamer, which is a turntable instead??? Doing Layouts not in a Cartesian but in a Polar coordinate system??? Even spin-coating seems to work. - Minutes later - Okay, I got lost on youtube watching a lot of DIY stuff with Blu-ray laser-diodes. Don't do this at home [2] :-o I guess a diode for Blu-ray players "ought to be enough for anybody".. Regards, Hagen. [0] https://en.wikipedia.org/wiki/Blu-ray#/media/File:Comparison_CD_DVD_HDDVD_BD... [1] https://commons.wikimedia.org/wiki/File:Spectrum_of_lithography_lights.PNG [2] https://www.youtube.com/watch?v=fJ77l23xwak
--- crowd-funded eco-conscious hardware: https://www.crowdsupply.com/eoma68 On Tue, Feb 1, 2022 at 6:46 PM Hagen SANKOWSKI <hsank@posteo.de> wrote:
Are we crazy, thinking about a laser beamer, which is a turntable instead??? Doing Layouts not in a Cartesian but in a Polar coordinate system??? Even spin-coating seems to work.
the only things to watch out for: 1) at the furthest extent of reach is the accuracy high enough. 2) are the steppers accurate enough (i.e. don't use anything other than Trinamic) 3) at the higher accuracy is the holding force enough (for every extra doubling of the stepper accuracy you correspondingly lose double the holding force) honestly i wouldn't consider it, but if you do, actually mount the robotic arm, held upside-down, on a standard X-Y cartesian overhead gantry. then you get the best of both worlds. * X is cartesian * Y is cartesian * Z is cartesian * robot-rotate (about Z) is polar * robot-extend-outwards (if you even have it) is polar * robot-up is polar l.
Hi
I bet, we can cannibalise cheap laser-diodes from Blu-ray devices. I do not really like this DRM-stuff anyway :-) Haha! Good stance! ;-)
BTW, Blu-ray devices use 405 nm laser-diodes [0] - which is *precisely* the H-line on ultraviolet photolithography [1]. The H-line is still visible for the human eye and known as "black light". This is true
Are we crazy, thinking about a laser beamer, which is a turntable instead??? Doing Layouts not in a Cartesian but in a Polar coordinate system??? Even spin-coating seems to work. To the first question: Yes :-)
- Minutes later -
Okay, I got lost on youtube watching a lot of DIY stuff with Blu-ray laser-diodes. Don't do this at home [2] :-o I guess a diode for Blu-ray players "ought to be enough for anybody".. So, the reason why using a laser won't make you very happy, is the amount of time it takes to expose one single layout due to the scanning time. That's the reason why making masks with a laser scriber takes so long, and also the reason E-Beam takes a very long time, which also has to scan over the wafer.
Cheers -lev
participants (4)
-
David Lanzendörfer -
Hagen SANKOWSKI -
Luke Kenneth Casson Leighton -
Philipp Gühring