March 2018 - Libresilicon-developers

Easterhegg Würzburg
by Hagen SANKOWSKI 16 Mar '18

16 Mar '18

Hello. I got this days a Email from CCC event in Würzburg called Easterhegg - they accept my 30min Talk about LibreSilicon :-) Let's collect all talking items I should mention here. Which talking items I should mention? Regards, Hagen.

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Gate sizes
by David Lanzendörfer 13 Mar '18

13 Mar '18

Hi I now went through all the machines we're going to use and there is nothing which keeps us from having a feature size from 0.5 um in overall. Which means that the smallest an inverter could get is 2.5 um x 8.0um Also if someone feels like figuring out how to render this document into HTML feel free. I think it slowly becomes too big of a document to ship it as a PDF... I'll drop some explenation on why the oxide etching with 0.5um isn't an issue as long as the mask is exposed properly in the document, but I think it's pretty clear, that there will be nothing stopping us from at least scaling down to 500nm pretty quickly as soon as we've got 1um working... At least from the lithographic and equipment point of view. Cheers David

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Test wafer
by David Lanzendörfer 13 Mar '18

13 Mar '18

Hi We should start drawing the test wafer components. We can use Magic already until we get around and fix up QtFlow and it's Magic editor component. We can make our own "pad frame" which for now just consists of passive aluminum bonding pads and then we hook up all our testing components to it within. I already started defining some of the test structures conceptionally in the chapter "Testing". That's something where Hagen also could join the party, and you too Tim ;-) For quicker rendering and editing I've split out the chapter into the file here https://github.com/leviathanch/libresiliconprocess/blob/master/documentatio… https://github.com/leviathanch/libresiliconprocess/blob/master/documentatio… Also some input: Feel free to add more possible diode geometries you would suggest to include into the test wafer for measurement. And again: If someone wants to come to Hong Kong and help in the clean room, feel free! Cheers David

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Finally! Solved the issue with spacers and silicide
by David Lanzendörfer 10 Mar '18

10 Mar '18

Hi all I've you have a look into the document, I've just pushed the results from my research into the topic of how to reduce the poly/dran/gate resistance. I've also cracked the problem of how to etch spacers. Can you folks think of any more test structures for the test-section besides plain NMOS/PMOS and different caps and resistors using all the different layers? Cheers David

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Sunday
by David Lanzendörfer 09 Mar '18

09 Mar '18

Hi I'm still in the process of recalculating the new process parameters because of the switch to polysilicon, and also I need to decide on the machines for the last few steps. Who's all joining in this Sunday for the mumble conference? Cheers David

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ESD
by David Lanzendörfer 08 Mar '18

08 Mar '18

Hi I've just found this article here: https://read01.com/gO8jKA.html#.WqGpRXVBiV4 We have to do this! https://i2.read01.com/SIG=20vgqvc/3046575a433439423531.jpg Cheers David -- Best regards CEO, David Lanzendörfer Lanceville Technology 22A, Block2, China Phoenix Mansion, No.2008 Shennan Boulevard, Futian District, Shenzhen

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Poly vs. Aluminum
by David Lanzendörfer 06 Mar '18

06 Mar '18

Hi folks Going through the process over and over again I have to appreciate Stafs input on the gate alignment. Already with 1um it's very difficult to get a proper alignment of the overlap of the drain/source and the gate. Maybe we should consider poly silicon after all? (It won't affect the layout) Cheers David

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Numbers
by David Lanzendörfer 05 Mar '18

05 Mar '18

Hi I'm reworking the transistor characteristics formulas during the next few days, because if you look at the wxMaxima worksheets and plot the threshold functions, they seem to be kind of off... Which means, I'll literally go over the books again there and see what I'm doing wrong. I've got some suspicions, but I postpone that, so that I can get some sleep before the sun comes out again ^^' @Staf: I've now removed the etching step for the hard mask removal and replaced it with a CMP step. The machine I've linked in the step can polish away nitride and oxide at once. Cheers David

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Logic levels
by David Lanzendörfer 05 Mar '18

05 Mar '18

Hi Okey. I just realized that I was totally "optimizing" for things which don't make sense... Of course the pull up has to pull up, as soon as 0.8V is reached and the pull down needs to pull down at 2V, not the other way around... I mixed up numbers. Seems I'm stressing myself because and get totally confused as soon as people start looking me and expect something to see ^_^' Yeah. Now finally I agree. 0.8V and -0.8V are more than enough for the transistors. Cheers! David

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The Spice Model BSIM3v3 for MOSFETs
by Hagen SANKOWSKI 05 Mar '18

05 Mar '18

There are a couple of MOSFET Models available, the last one I came across was BSIM4 (for deep-sub-Mircon <100 nm) and BSIM3 which ought to be good enough down to 180 nm. @David, your Simulator uses the most simplest (and fastest) Model which is know as a first generation model for default. So, the 3rd generation model, quite more complicated has a couple of more parameters to tune. Here is the documentation from ngspice, btw. the best FOSS spice simulator we can use. http://ngspice.sourceforge.net/external-documents/models/bsim330_manual.pdf We need reasonable values for *all* parameters!

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Libresilicon-developers March 2018