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Stepper resolution
by David Lanzendörfer 16 Apr '21

16 Apr '21

Hi So turns out there's another way to achieve higher resolutions (below 100nm), without having to use EUV light and low pressure. You can give your exposure unit a nice bath :-) https://en.wikipedia.org/wiki/Immersion_lithography What do you folks think? Worth considering putting on our TODO list for future stepper iterations? Cheers -lev

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Announcement - Mumble session on Sunday 2021-04-18 @ 18:00 UTC
by Hagen SANKOWSKI 16 Apr '21

16 Apr '21

Hello List! This is our weekly announcement for the next Mumble Sessions on Sunday 2021-04-18 @ 18:00 UTC. Please join us as usual at our Mumble Server murmur.libresilicon.com at Port 64738, the Channel is IC. We like to follow-up our topics from mumble sessions before. Regards, Hagen.

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Ouch!
by Hagen SANKOWSKI 16 Apr '21

16 Apr '21

https://asia.nikkei.com/Business/Tech/Semiconductors/Chip-tools-become-late…

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Re: [Libre-silicon-devel] Stepper resolution
by David Lanzendörfer 16 Apr '21

16 Apr '21

Hi I'm aware of the complexity... That's I said "future iterations" :-) Cheers -lev On Friday, April 16, 2021 10:19:48 AM WEST ludwig jaffe wrote: > Hi all, > > this looks interesting, but beware complexity! > Polarization and other effects are to be taken care of. > > One idea for this would be to use oil immersion lenses > of microscopes and to try to reverse the beam pattern and > to step these. > > But we are hobbyists, and the only advantage we have is > access to knowledge but we also dont get all the details. > > So being part time scientists we should aim for low hanging fruit > first. > > Cheers, > > Ludwig > > On 4/15/21, David Lanzendörfer <leviathan(a)libresilicon.com> wrote: > > Hi > > So turns out there's another way to achieve higher resolutions (below > > 100nm), > > without having to use EUV light and low pressure. > > You can give your exposure unit a nice bath :-) > > https://en.wikipedia.org/wiki/Immersion_lithography > > > > What do you folks think? Worth considering putting on our TODO list for > > future > > stepper iterations? > > > > Cheers > > -lev > > > > _______________________________________________ > > Libresilicon-developers mailing list > > Libresilicon-developers(a)list.libresilicon.com > > https://list.libresilicon.com/mailman/listinfo/libresilicon-developers

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Stepper
by David Lanzendörfer 15 Apr '21

15 Apr '21

Hi I guess I'll probably build something like this table here with linear ball bearings and a fixed gear shift which divides the steps of the stepper motor, so that I can have an appropriate stepping resolution for positioning. https://de.aliexpress.com/item/4001178550238.html I'm aware of the trouble with parallel alignment of two linear rail bars, but I'm afraid I'll have to deal with it, for at least one of the axis. I'll probably start ordering the parts as soon as I'm done moving into the new location next week and then I'll start extending the construction from there until I've got at least the x-y-positioning figured out. The loading mechanism also is pretty annoying... Besides having to build my own custom guided ball bearing for the angular alignment, I'll need at least 4 customely made metal parts... :-/ Cheers -lev

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GloveBox
by David Lanzendörfer 15 Apr '21

15 Apr '21

Hi I was thinking about using sheet metal for everything which doesn't need to be transparent (even cheaper than acrylic glas). For the airlock I was figuring I could do a cut out like in the attached screen and fold it, then either weld or screw an aluminum box made from folded sheet metal as well. What do you think? Cheers -lev

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Stepper
by David Lanzendörfer 10 Apr '21

10 Apr '21

Hi So for detecting the aligner markers I'll probably use the MLX90640ESF- BAA-000-SP[1] for detecting the alignment marker by shining through the waver with an IR LED. This resist[2] here can be exposed with a UV LED[3] up to 450nm wavelength, which is well within the tolerance range of the DLP2000[4] (on page 8). I'm right now working out the radial alignment and the loading mechanism, which is actually much harder than originally envisioned, because I kind of need a suction mechanism because I don't wanna scratch the surface or expose the wafer to too much mechanical stress. Cheers -lev [1] https://eu.mouser.com/ProductDetail/Melexis/MLX90640ESF-BAA-000-SP/? qs=y6ZabgHbY%252Bz1Luyoz5kAtA== [2] https://www.microresist.de/en/produkt/ma-p-1200g-series/ [3] https://protosupplies.com/product/led-3w-deep-blue-440-445nm-10-pack/ [4] https://www.ti.com/lit/ds/symlink/dlp2000.pdf

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Lifespan & UV
by David Lanzendörfer 10 Apr '21

10 Apr '21

Hi So in the data sheet of the DLP2000 they say that UV light will reduce the life span of the DMD chip. However. Sam Zeloof is using a DMD display from an overhead projector and it seems to be working ok. Should I take the chance and take this 30 Euro chips from Mouser, although the data sheet says, UV wouldn't be advised? I mean, I still can replace the chip afterwards through a more expensive UV chip, when the rest of the machine works... Cheers -lev

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GloveBox
by David Lanzendörfer 10 Apr '21

10 Apr '21

Hi Attached you can find a screen capture of what I've got so far for the 3D design for the glove box. On the right I'm going to make some cut out and will have a small double door box, as an air lock. Cheers -lev

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Announcement - Mumble session on Sunday 2021-04-11 @ 18:00 UTC
by Hagen SANKOWSKI 10 Apr '21

10 Apr '21

Hello List! This is our weekly announcement for the next Mumble Sessions on Sunday 2021-04-11 @ 18:00 UTC. Please join us as usual at our Mumble Server murmur.libresilicon.com at Port 64738, the Channel is IC. We like to follow-up our meeting minutes from mumble sessions before. Regards, Hagen.

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